JPH0363807B2 - - Google Patents

Info

Publication number
JPH0363807B2
JPH0363807B2 JP59244945A JP24494584A JPH0363807B2 JP H0363807 B2 JPH0363807 B2 JP H0363807B2 JP 59244945 A JP59244945 A JP 59244945A JP 24494584 A JP24494584 A JP 24494584A JP H0363807 B2 JPH0363807 B2 JP H0363807B2
Authority
JP
Japan
Prior art keywords
sio
etching
gas
oxygen
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59244945A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61123142A (ja
Inventor
Kazuyuki Tomita
Masuo Tanno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59244945A priority Critical patent/JPS61123142A/ja
Priority to US06/799,657 priority patent/US4678539A/en
Publication of JPS61123142A publication Critical patent/JPS61123142A/ja
Publication of JPH0363807B2 publication Critical patent/JPH0363807B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/53—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete
    • C04B41/5338—Etching
    • C04B41/5346—Dry etching
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/91—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics involving the removal of part of the materials of the treated articles, e.g. etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP59244945A 1984-11-20 1984-11-20 ドライエツチング方法 Granted JPS61123142A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP59244945A JPS61123142A (ja) 1984-11-20 1984-11-20 ドライエツチング方法
US06/799,657 US4678539A (en) 1984-11-20 1985-11-19 Dry-etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59244945A JPS61123142A (ja) 1984-11-20 1984-11-20 ドライエツチング方法

Publications (2)

Publication Number Publication Date
JPS61123142A JPS61123142A (ja) 1986-06-11
JPH0363807B2 true JPH0363807B2 (https=) 1991-10-02

Family

ID=17126295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59244945A Granted JPS61123142A (ja) 1984-11-20 1984-11-20 ドライエツチング方法

Country Status (2)

Country Link
US (1) US4678539A (https=)
JP (1) JPS61123142A (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4923562A (en) * 1987-07-16 1990-05-08 Texas Instruments Incorporated Processing of etching refractory metals
US4873118A (en) * 1988-11-18 1989-10-10 Atlantic Richfield Company Oxygen glow treating of ZnO electrode for thin film silicon solar cell
EP0406434B1 (en) * 1988-11-18 1996-07-17 Kabushiki Kaisha Shibaura Seisakusho Dry-etching method
EP0424299A3 (en) * 1989-10-20 1991-08-28 International Business Machines Corporation Selective silicon nitride plasma etching
US5188704A (en) * 1989-10-20 1993-02-23 International Business Machines Corporation Selective silicon nitride plasma etching
US5296095A (en) * 1990-10-30 1994-03-22 Matsushita Electric Industrial Co., Ltd. Method of dry etching
US5431772A (en) * 1991-05-09 1995-07-11 International Business Machines Corporation Selective silicon nitride plasma etching process
DE4232475C2 (de) * 1992-09-28 1998-07-02 Siemens Ag Verfahren zum plasmachemischen Trockenätzen von Si¶3¶N¶4¶-Schichten hochselektiv zu SiO¶2¶-Schichten
US5756402A (en) * 1992-12-28 1998-05-26 Kabushiki Kaisha Toshiba Method of etching silicon nitride film
TW365029B (en) * 1995-09-28 1999-07-21 Mitsui Chemicals Inc Dry processing gas
US5824604A (en) * 1996-01-23 1998-10-20 Mattson Technology, Inc. Hydrocarbon-enhanced dry stripping of photoresist
US5911887A (en) * 1996-07-19 1999-06-15 Cypress Semiconductor Corporation Method of etching a bond pad
JP3559691B2 (ja) * 1997-09-04 2004-09-02 株式会社日立製作所 半導体装置の製造方法
US6536449B1 (en) 1997-11-17 2003-03-25 Mattson Technology Inc. Downstream surface cleaning process
WO2007105261A1 (ja) * 2006-03-09 2007-09-20 Philtech Inc. 層間絶縁膜のドライエッチング方法
US20090191715A1 (en) * 2006-03-09 2009-07-30 Toshio Hayashi Method for etching interlayer dielectric film
JP5537324B2 (ja) * 2010-08-05 2014-07-02 株式会社東芝 半導体装置の製造方法
CN107708840B (zh) * 2015-05-29 2022-12-20 俄亥俄州创新基金会 从气体流分离co2的方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8004005A (nl) * 1980-07-11 1982-02-01 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting.

Also Published As

Publication number Publication date
JPS61123142A (ja) 1986-06-11
US4678539A (en) 1987-07-07

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term