JPH0362223B2 - - Google Patents
Info
- Publication number
- JPH0362223B2 JPH0362223B2 JP59246115A JP24611584A JPH0362223B2 JP H0362223 B2 JPH0362223 B2 JP H0362223B2 JP 59246115 A JP59246115 A JP 59246115A JP 24611584 A JP24611584 A JP 24611584A JP H0362223 B2 JPH0362223 B2 JP H0362223B2
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- peltier
- metal
- temperature
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/38—Cooling arrangements using the Peltier effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24611584A JPS61125157A (ja) | 1984-11-22 | 1984-11-22 | 冷却用集積素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24611584A JPS61125157A (ja) | 1984-11-22 | 1984-11-22 | 冷却用集積素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61125157A JPS61125157A (ja) | 1986-06-12 |
| JPH0362223B2 true JPH0362223B2 (enrdf_load_html_response) | 1991-09-25 |
Family
ID=17143704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24611584A Granted JPS61125157A (ja) | 1984-11-22 | 1984-11-22 | 冷却用集積素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61125157A (enrdf_load_html_response) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012078285A (ja) * | 2010-10-05 | 2012-04-19 | Ricoh Co Ltd | 電気素子、集積素子及び電子回路 |
| JP2012122862A (ja) * | 2010-12-08 | 2012-06-28 | Ricoh Co Ltd | 露点計測装置および気体特性測定装置 |
| JP2012122861A (ja) * | 2010-12-08 | 2012-06-28 | Ricoh Co Ltd | 露点計測装置および気体特性測定装置 |
| JP2012122863A (ja) * | 2010-12-08 | 2012-06-28 | Ricoh Co Ltd | 露点計測装置および気体特性測定装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0421853U (enrdf_load_html_response) * | 1990-06-08 | 1992-02-24 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5613263B2 (enrdf_load_html_response) * | 1973-10-24 | 1981-03-27 | ||
| JPS5697857A (en) * | 1979-12-29 | 1981-08-06 | Ricoh Co Ltd | Electric heater |
| JPS5796244A (en) * | 1980-12-08 | 1982-06-15 | Asahi Glass Co Ltd | Measuring device for humidity |
-
1984
- 1984-11-22 JP JP24611584A patent/JPS61125157A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012078285A (ja) * | 2010-10-05 | 2012-04-19 | Ricoh Co Ltd | 電気素子、集積素子及び電子回路 |
| JP2012122862A (ja) * | 2010-12-08 | 2012-06-28 | Ricoh Co Ltd | 露点計測装置および気体特性測定装置 |
| JP2012122861A (ja) * | 2010-12-08 | 2012-06-28 | Ricoh Co Ltd | 露点計測装置および気体特性測定装置 |
| JP2012122863A (ja) * | 2010-12-08 | 2012-06-28 | Ricoh Co Ltd | 露点計測装置および気体特性測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61125157A (ja) | 1986-06-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0374945B2 (enrdf_load_html_response) | ||
| US6631638B2 (en) | Fluid flow sensor | |
| US5048336A (en) | Moisture-sensitive device | |
| US4888988A (en) | Silicon based mass airflow sensor and its fabrication method | |
| JP3333712B2 (ja) | 流量検出素子およびそれを用いた流量センサ | |
| US5050429A (en) | Microbridge flow sensor | |
| EP0395721B1 (en) | Control and detection circuitry for mass airflow sensors | |
| JPH05508915A (ja) | 温度バイアス形抵抗エレメントを用いた薄膜空気流センサ | |
| JPH0362223B2 (enrdf_load_html_response) | ||
| JPH08292202A (ja) | 検出装置 | |
| JPH0374943B2 (enrdf_load_html_response) | ||
| JPS61124861A (ja) | 湿度検出用素子 | |
| JPS638915A (ja) | 薄膜冷却素子およびその制御方法 | |
| JPS639167A (ja) | 薄膜冷却素子の温度検出方法 | |
| JPS61124857A (ja) | 湿度検出用素子 | |
| JPH10332455A (ja) | フローセンサ及びその製造方法 | |
| JPS638916A (ja) | 薄膜冷却素子およびその制御方法 | |
| JPS638545A (ja) | 湿度検出方法 | |
| JPS638546A (ja) | 薄膜冷却素子の水滴検出方法 | |
| JPH0374944B2 (enrdf_load_html_response) | ||
| JP2002286519A (ja) | 熱式流速センサ | |
| JP3049122B2 (ja) | フローセンサー | |
| JPH0612493Y2 (ja) | マイクロブリッジフローセンサ | |
| JP2772776B2 (ja) | サーモパイル | |
| JP3524707B2 (ja) | マイクロフローセンサ素子 |