JPH0361862B2 - - Google Patents

Info

Publication number
JPH0361862B2
JPH0361862B2 JP60158240A JP15824085A JPH0361862B2 JP H0361862 B2 JPH0361862 B2 JP H0361862B2 JP 60158240 A JP60158240 A JP 60158240A JP 15824085 A JP15824085 A JP 15824085A JP H0361862 B2 JPH0361862 B2 JP H0361862B2
Authority
JP
Japan
Prior art keywords
valve
valve plate
vacuum valve
shield
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60158240A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6220973A (ja
Inventor
Yoshasu Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60158240A priority Critical patent/JPS6220973A/ja
Publication of JPS6220973A publication Critical patent/JPS6220973A/ja
Publication of JPH0361862B2 publication Critical patent/JPH0361862B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Sliding Valves (AREA)
JP60158240A 1985-07-19 1985-07-19 真空バルブ Granted JPS6220973A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60158240A JPS6220973A (ja) 1985-07-19 1985-07-19 真空バルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60158240A JPS6220973A (ja) 1985-07-19 1985-07-19 真空バルブ

Publications (2)

Publication Number Publication Date
JPS6220973A JPS6220973A (ja) 1987-01-29
JPH0361862B2 true JPH0361862B2 (enrdf_load_stackoverflow) 1991-09-24

Family

ID=15667326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60158240A Granted JPS6220973A (ja) 1985-07-19 1985-07-19 真空バルブ

Country Status (1)

Country Link
JP (1) JPS6220973A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4980794B2 (ja) * 2007-05-24 2012-07-18 日本電子株式会社 荷電粒子ビーム装置
JP4561814B2 (ja) * 2007-11-21 2010-10-13 Ｔｄｋ株式会社 ミリング装置
DE102008049353A1 (de) 2008-09-29 2010-04-08 Vat Holding Ag Vakuumventil
JP4997361B2 (ja) * 2009-03-05 2012-08-08 Ｓｍｃ株式会社 真空バルブ
CN114657538B (zh) * 2022-03-25 2024-02-02 厦门韫茂科技有限公司 一种连续式ald镀膜设备的腔体结构

Also Published As

Publication number Publication date
JPS6220973A (ja) 1987-01-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees