JPH0158795B2 - - Google Patents
Info
- Publication number
- JPH0158795B2 JPH0158795B2 JP13449783A JP13449783A JPH0158795B2 JP H0158795 B2 JPH0158795 B2 JP H0158795B2 JP 13449783 A JP13449783 A JP 13449783A JP 13449783 A JP13449783 A JP 13449783A JP H0158795 B2 JPH0158795 B2 JP H0158795B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- vacuum
- plate
- electromagnetic
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/0644—One-way valve
- F16K31/0668—Sliding valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/0644—One-way valve
- F16K31/0648—One-way valve the armature and the valve member forming one element
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Valves (AREA)
- Magnetically Actuated Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13449783A JPS6026868A (ja) | 1983-07-25 | 1983-07-25 | 高真空装置用遮断弁装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13449783A JPS6026868A (ja) | 1983-07-25 | 1983-07-25 | 高真空装置用遮断弁装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6026868A JPS6026868A (ja) | 1985-02-09 |
| JPH0158795B2 true JPH0158795B2 (enrdf_load_stackoverflow) | 1989-12-13 |
Family
ID=15129698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13449783A Granted JPS6026868A (ja) | 1983-07-25 | 1983-07-25 | 高真空装置用遮断弁装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6026868A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07103178A (ja) * | 1993-10-08 | 1995-04-18 | Ebara Corp | 無漏洩ポンプ |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6298079A (ja) * | 1985-10-23 | 1987-05-07 | Mitsubishi Mining & Cement Co Ltd | 電磁アクチユエ−タの動作検知装置 |
| CN110296323B (zh) * | 2019-06-21 | 2021-06-08 | 中海石油气电集团有限责任公司 | 一种管道清管器泄流孔动态工作装置及其使用方法 |
-
1983
- 1983-07-25 JP JP13449783A patent/JPS6026868A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07103178A (ja) * | 1993-10-08 | 1995-04-18 | Ebara Corp | 無漏洩ポンプ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6026868A (ja) | 1985-02-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100495897B1 (ko) | 유체제어밸브 및 유체공급·배기시스템 | |
| US5497135A (en) | Bistable electromagnet, particularly an electromagnetic valve | |
| KR101534359B1 (ko) | 진공밸브를 제어 또는 조절하기 위한 방법 | |
| JP6169327B2 (ja) | プラズマ・イオン源内において異なる処理ガスを迅速に切り替える方法および構造 | |
| CA2112281C (en) | Solenoid valve with dirt trap | |
| US2975119A (en) | Vertical rod drive mechanism | |
| US4178573A (en) | Electrically operated device and valving mechanism employing same | |
| US20180163876A1 (en) | Vacuum gate valve | |
| US2612188A (en) | Solenoid-operated gas valve | |
| JPH0158795B2 (enrdf_load_stackoverflow) | ||
| US4714089A (en) | Electromagnetic proportional control valve | |
| US2294421A (en) | Valve structure | |
| US20070075288A1 (en) | Gate valve | |
| EP0422264B1 (en) | Solenoid valve | |
| US2504428A (en) | Electrically operated shutoff valve | |
| US2125910A (en) | Vacuum valve | |
| US4513945A (en) | Electromagnetic reed valve | |
| JPS6165976A (ja) | 高真空装置等の緊急遮断用ゲ−ト弁装置 | |
| JP2740636B2 (ja) | パイロット式ダイヤフラム弁 | |
| JP3764563B2 (ja) | 電気駆動制御器 | |
| CN112944023B (zh) | 防误动式电磁阀 | |
| JPS6336219Y2 (enrdf_load_stackoverflow) | ||
| JPH11311359A (ja) | 流量制御バルブ及びこれを用いたガスクロマトグラフ装置 | |
| JPS6330870Y2 (enrdf_load_stackoverflow) | ||
| JP3563423B2 (ja) | 遮断弁用操作装置 |