JPH0158795B2 - - Google Patents

Info

Publication number
JPH0158795B2
JPH0158795B2 JP13449783A JP13449783A JPH0158795B2 JP H0158795 B2 JPH0158795 B2 JP H0158795B2 JP 13449783 A JP13449783 A JP 13449783A JP 13449783 A JP13449783 A JP 13449783A JP H0158795 B2 JPH0158795 B2 JP H0158795B2
Authority
JP
Japan
Prior art keywords
valve
vacuum
plate
electromagnetic
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13449783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6026868A (ja
Inventor
Norikimi Irie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Irie Koken Co Ltd
Original Assignee
Irie Koken Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Irie Koken Co Ltd filed Critical Irie Koken Co Ltd
Priority to JP13449783A priority Critical patent/JPS6026868A/ja
Publication of JPS6026868A publication Critical patent/JPS6026868A/ja
Publication of JPH0158795B2 publication Critical patent/JPH0158795B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F16K31/0668—Sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F16K31/0648—One-way valve the armature and the valve member forming one element

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Magnetically Actuated Valves (AREA)
JP13449783A 1983-07-25 1983-07-25 高真空装置用遮断弁装置 Granted JPS6026868A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13449783A JPS6026868A (ja) 1983-07-25 1983-07-25 高真空装置用遮断弁装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13449783A JPS6026868A (ja) 1983-07-25 1983-07-25 高真空装置用遮断弁装置

Publications (2)

Publication Number Publication Date
JPS6026868A JPS6026868A (ja) 1985-02-09
JPH0158795B2 true JPH0158795B2 (enrdf_load_stackoverflow) 1989-12-13

Family

ID=15129698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13449783A Granted JPS6026868A (ja) 1983-07-25 1983-07-25 高真空装置用遮断弁装置

Country Status (1)

Country Link
JP (1) JPS6026868A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07103178A (ja) * 1993-10-08 1995-04-18 Ebara Corp 無漏洩ポンプ

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6298079A (ja) * 1985-10-23 1987-05-07 Mitsubishi Mining & Cement Co Ltd 電磁アクチユエ−タの動作検知装置
CN110296323B (zh) * 2019-06-21 2021-06-08 中海石油气电集团有限责任公司 一种管道清管器泄流孔动态工作装置及其使用方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07103178A (ja) * 1993-10-08 1995-04-18 Ebara Corp 無漏洩ポンプ

Also Published As

Publication number Publication date
JPS6026868A (ja) 1985-02-09

Similar Documents

Publication Publication Date Title
KR100495897B1 (ko) 유체제어밸브 및 유체공급·배기시스템
US6047718A (en) Solenoid valve having coaxial armatures in a single coil design
US5497135A (en) Bistable electromagnet, particularly an electromagnetic valve
KR101534359B1 (ko) 진공밸브를 제어 또는 조절하기 위한 방법
US4304264A (en) Solenoid actuated valve
JP6169327B2 (ja) プラズマ・イオン源内において異なる処理ガスを迅速に切り替える方法および構造
US5971356A (en) Electromagnetically actuable valve
CA2112281C (en) Solenoid valve with dirt trap
US2975119A (en) Vertical rod drive mechanism
US2612188A (en) Solenoid-operated gas valve
JPH0158795B2 (enrdf_load_stackoverflow)
US20180163876A1 (en) Vacuum gate valve
US2294421A (en) Valve structure
US2442599A (en) Glass magnetic stopcock
US1622672A (en) Magnetically-controlled fluid valve
EP0422264B1 (en) Solenoid valve
US2504428A (en) Electrically operated shutoff valve
JPH07332534A (ja) パイロット操作・自動閉止型流体制御用電磁弁
US2125910A (en) Vacuum valve
CN111594663A (zh) 一种电子截止阀
JPS6165976A (ja) 高真空装置等の緊急遮断用ゲ−ト弁装置
JP3764563B2 (ja) 電気駆動制御器
CN112944023B (zh) 防误动式电磁阀
JPS6336219Y2 (enrdf_load_stackoverflow)
JPH11311359A (ja) 流量制御バルブ及びこれを用いたガスクロマトグラフ装置