JPH0240311Y2 - - Google Patents

Info

Publication number
JPH0240311Y2
JPH0240311Y2 JP2864887U JP2864887U JPH0240311Y2 JP H0240311 Y2 JPH0240311 Y2 JP H0240311Y2 JP 2864887 U JP2864887 U JP 2864887U JP 2864887 U JP2864887 U JP 2864887U JP H0240311 Y2 JPH0240311 Y2 JP H0240311Y2
Authority
JP
Japan
Prior art keywords
valve
valve body
shield
valve seat
sealing material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2864887U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63136274U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2864887U priority Critical patent/JPH0240311Y2/ja
Publication of JPS63136274U publication Critical patent/JPS63136274U/ja
Application granted granted Critical
Publication of JPH0240311Y2 publication Critical patent/JPH0240311Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2864887U 1987-02-27 1987-02-27 Expired JPH0240311Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2864887U JPH0240311Y2 (enrdf_load_stackoverflow) 1987-02-27 1987-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2864887U JPH0240311Y2 (enrdf_load_stackoverflow) 1987-02-27 1987-02-27

Publications (2)

Publication Number Publication Date
JPS63136274U JPS63136274U (enrdf_load_stackoverflow) 1988-09-07
JPH0240311Y2 true JPH0240311Y2 (enrdf_load_stackoverflow) 1990-10-26

Family

ID=30831809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2864887U Expired JPH0240311Y2 (enrdf_load_stackoverflow) 1987-02-27 1987-02-27

Country Status (1)

Country Link
JP (1) JPH0240311Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63136274U (enrdf_load_stackoverflow) 1988-09-07

Similar Documents

Publication Publication Date Title
JP2002228043A (ja) 真空バルブ
US5447614A (en) Method of processing a sample using a charged beam and reactive gases and system employing the same
JP2002295687A (ja) 真空室の貫通装置及び真空バルブ
US4961413A (en) Exhaust gas recirculation valve assembly
KR20070029558A (ko) 유로의 본질적인 기밀 폐쇄를 위한 밸브
JPH0240311Y2 (enrdf_load_stackoverflow)
US6300630B1 (en) Annular differential seal for electron beam apparatus using isolation valve and additional differential pumping
US5020505A (en) Exhaust gas recirculation valve assembly
JP4063201B2 (ja) 電子ビーム照射装置
JP2003185035A (ja) ゲートバルブ
JP2631594B2 (ja) ゲートバルブ
JPS5938701B2 (ja) 二段試料台を備えた走査型電子顕微鏡
JP2944154B2 (ja) 真空設備
JPH06283124A (ja) 荷電ビーム装置
US20030178579A1 (en) Stage devices exhibiting reduced deformation, and microlithography systems comprising same
JP2002151578A (ja) 真空中で使用するエアベアリングリニアガイド
CA2410276C (en) Gas-tight shut-off valve for a material charging or discharging lock
JP2854466B2 (ja) 荷電粒子線装置
JPH0361862B2 (enrdf_load_stackoverflow)
JPS58178066A (ja) 高速真空ゲ−トバルブ
JPS59117965A (ja) 四方切換弁
JPH04215240A (ja) 荷電粒子線装置
KR20090009774A (ko) 노광 장치
JPH04157399A (ja) Ｓｏｒ光装置の光取り出しライン
US5221845A (en) Frictionless linear actuator