JPH0361363A - イオンプレーティング装置 - Google Patents
イオンプレーティング装置Info
- Publication number
- JPH0361363A JPH0361363A JP19674789A JP19674789A JPH0361363A JP H0361363 A JPH0361363 A JP H0361363A JP 19674789 A JP19674789 A JP 19674789A JP 19674789 A JP19674789 A JP 19674789A JP H0361363 A JPH0361363 A JP H0361363A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- chamber
- substrate
- base material
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007733 ion plating Methods 0.000 title claims description 21
- 239000000463 material Substances 0.000 claims abstract description 69
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000000498 cooling water Substances 0.000 claims abstract description 13
- 238000001816 cooling Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 239000010409 thin film Substances 0.000 abstract description 16
- 238000007740 vapor deposition Methods 0.000 abstract description 12
- 239000010408 film Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 238000010894 electron beam technology Methods 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 235000015170 shellfish Nutrition 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19674789A JPH0361363A (ja) | 1989-07-31 | 1989-07-31 | イオンプレーティング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19674789A JPH0361363A (ja) | 1989-07-31 | 1989-07-31 | イオンプレーティング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0361363A true JPH0361363A (ja) | 1991-03-18 |
| JPH0548303B2 JPH0548303B2 (enrdf_load_stackoverflow) | 1993-07-21 |
Family
ID=16362937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19674789A Granted JPH0361363A (ja) | 1989-07-31 | 1989-07-31 | イオンプレーティング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0361363A (enrdf_load_stackoverflow) |
-
1989
- 1989-07-31 JP JP19674789A patent/JPH0361363A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0548303B2 (enrdf_load_stackoverflow) | 1993-07-21 |
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