JPH0548303B2 - - Google Patents

Info

Publication number
JPH0548303B2
JPH0548303B2 JP19674789A JP19674789A JPH0548303B2 JP H0548303 B2 JPH0548303 B2 JP H0548303B2 JP 19674789 A JP19674789 A JP 19674789A JP 19674789 A JP19674789 A JP 19674789A JP H0548303 B2 JPH0548303 B2 JP H0548303B2
Authority
JP
Japan
Prior art keywords
chamber
base material
plasma
holder
ion plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19674789A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0361363A (ja
Inventor
Torao Tazo
Makoto Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SURFACE HIGH PERFORMANCE RES
Original Assignee
SURFACE HIGH PERFORMANCE RES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SURFACE HIGH PERFORMANCE RES filed Critical SURFACE HIGH PERFORMANCE RES
Priority to JP19674789A priority Critical patent/JPH0361363A/ja
Publication of JPH0361363A publication Critical patent/JPH0361363A/ja
Publication of JPH0548303B2 publication Critical patent/JPH0548303B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP19674789A 1989-07-31 1989-07-31 イオンプレーティング装置 Granted JPH0361363A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19674789A JPH0361363A (ja) 1989-07-31 1989-07-31 イオンプレーティング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19674789A JPH0361363A (ja) 1989-07-31 1989-07-31 イオンプレーティング装置

Publications (2)

Publication Number Publication Date
JPH0361363A JPH0361363A (ja) 1991-03-18
JPH0548303B2 true JPH0548303B2 (enrdf_load_stackoverflow) 1993-07-21

Family

ID=16362937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19674789A Granted JPH0361363A (ja) 1989-07-31 1989-07-31 イオンプレーティング装置

Country Status (1)

Country Link
JP (1) JPH0361363A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0361363A (ja) 1991-03-18

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