JPH0361033B2 - - Google Patents

Info

Publication number
JPH0361033B2
JPH0361033B2 JP58114280A JP11428083A JPH0361033B2 JP H0361033 B2 JPH0361033 B2 JP H0361033B2 JP 58114280 A JP58114280 A JP 58114280A JP 11428083 A JP11428083 A JP 11428083A JP H0361033 B2 JPH0361033 B2 JP H0361033B2
Authority
JP
Japan
Prior art keywords
shield
dry gas
discharge
pump case
cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58114280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS608480A (ja
Inventor
Hidetoshi Morimoto
Katsumi Morizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Cryogenics Inc
Original Assignee
Ulvac Cryogenics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Cryogenics Inc filed Critical Ulvac Cryogenics Inc
Priority to JP11428083A priority Critical patent/JPS608480A/ja
Publication of JPS608480A publication Critical patent/JPS608480A/ja
Publication of JPH0361033B2 publication Critical patent/JPH0361033B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP11428083A 1983-06-27 1983-06-27 クライオポンプの再生方法 Granted JPS608480A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11428083A JPS608480A (ja) 1983-06-27 1983-06-27 クライオポンプの再生方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11428083A JPS608480A (ja) 1983-06-27 1983-06-27 クライオポンプの再生方法

Publications (2)

Publication Number Publication Date
JPS608480A JPS608480A (ja) 1985-01-17
JPH0361033B2 true JPH0361033B2 (fr) 1991-09-18

Family

ID=14633874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11428083A Granted JPS608480A (ja) 1983-06-27 1983-06-27 クライオポンプの再生方法

Country Status (1)

Country Link
JP (1) JPS608480A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5228299A (en) * 1992-04-16 1993-07-20 Helix Technology Corporation Cryopump water drain
US5261244A (en) * 1992-05-21 1993-11-16 Helix Technology Corporation Cryogenic waterpump

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244405B2 (fr) * 1972-03-18 1977-11-08
JPS57146072A (en) * 1981-03-03 1982-09-09 Nec Corp Cryopump regenerating mechanism

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2321609A1 (fr) * 1975-08-22 1977-03-18 Air Liquide Cryopompe a regeneration

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244405B2 (fr) * 1972-03-18 1977-11-08
JPS57146072A (en) * 1981-03-03 1982-09-09 Nec Corp Cryopump regenerating mechanism

Also Published As

Publication number Publication date
JPS608480A (ja) 1985-01-17

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