JPH0359033B2 - - Google Patents
Info
- Publication number
- JPH0359033B2 JPH0359033B2 JP59267006A JP26700684A JPH0359033B2 JP H0359033 B2 JPH0359033 B2 JP H0359033B2 JP 59267006 A JP59267006 A JP 59267006A JP 26700684 A JP26700684 A JP 26700684A JP H0359033 B2 JPH0359033 B2 JP H0359033B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- sintered body
- weight
- dimensional accuracy
- density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 67
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 48
- 239000013078 crystal Substances 0.000 claims description 19
- 239000002245 particle Substances 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims description 2
- 238000005245 sintering Methods 0.000 description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 20
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 18
- 238000010304 firing Methods 0.000 description 18
- 229910052799 carbon Inorganic materials 0.000 description 17
- 239000007789 gas Substances 0.000 description 15
- 238000005452 bending Methods 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 11
- 229910052796 boron Inorganic materials 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 229910052742 iron Inorganic materials 0.000 description 9
- 229910052786 argon Inorganic materials 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000003575 carbonaceous material Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000007858 starting material Substances 0.000 description 5
- 239000007770 graphite material Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000005011 phenolic resin Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- -1 black Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- RNMDNPCBIKJCQP-UHFFFAOYSA-N 5-nonyl-7-oxabicyclo[4.1.0]hepta-1,3,5-trien-2-ol Chemical compound C(CCCCCCCC)C1=C2C(=C(C=C1)O)O2 RNMDNPCBIKJCQP-UHFFFAOYSA-N 0.000 description 1
- FHVDTGUDJYJELY-UHFFFAOYSA-N 6-{[2-carboxy-4,5-dihydroxy-6-(phosphanyloxy)oxan-3-yl]oxy}-4,5-dihydroxy-3-phosphanyloxane-2-carboxylic acid Chemical compound O1C(C(O)=O)C(P)C(O)C(O)C1OC1C(C(O)=O)OC(OP)C(O)C1O FHVDTGUDJYJELY-UHFFFAOYSA-N 0.000 description 1
- 229910052580 B4C Inorganic materials 0.000 description 1
- 229920002261 Corn starch Polymers 0.000 description 1
- 229920001732 Lignosulfonate Polymers 0.000 description 1
- 208000034809 Product contamination Diseases 0.000 description 1
- 239000006230 acetylene black Substances 0.000 description 1
- 229940072056 alginate Drugs 0.000 description 1
- 229920000615 alginic acid Polymers 0.000 description 1
- 235000010443 alginic acid Nutrition 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 150000001720 carbohydrates Chemical class 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000008120 corn starch Substances 0.000 description 1
- 229940099112 cornstarch Drugs 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 239000002296 pyrolytic carbon Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000011856 silicon-based particle Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59267006A JPS61143686A (ja) | 1984-12-18 | 1984-12-18 | 寸法精度の優れた耐熱性治具用炭化珪素質焼結体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59267006A JPS61143686A (ja) | 1984-12-18 | 1984-12-18 | 寸法精度の優れた耐熱性治具用炭化珪素質焼結体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61143686A JPS61143686A (ja) | 1986-07-01 |
| JPH0359033B2 true JPH0359033B2 (de) | 1991-09-09 |
Family
ID=17438745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59267006A Granted JPS61143686A (ja) | 1984-12-18 | 1984-12-18 | 寸法精度の優れた耐熱性治具用炭化珪素質焼結体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61143686A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2548542Y2 (ja) * | 1991-12-25 | 1997-09-24 | 博之 楓 | ポンプ循環式防錆剤供給装置 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6311589A (ja) * | 1986-07-01 | 1988-01-19 | イビデン株式会社 | 耐熱性治具及びその製造方法 |
| JPH0610684Y2 (ja) * | 1989-09-19 | 1994-03-16 | 株式会社カイジョー | ボンディング装置 |
| DE4392693T1 (de) * | 1992-06-08 | 1994-09-08 | Ngk Insulators Ltd | Temperaturwechselbeständige, kriechfeste und oxydationsfeste Einsätze |
| JP2758313B2 (ja) * | 1992-06-08 | 1998-05-28 | 日本碍子株式会社 | 耐スポーリング性棚板 |
| US5840436A (en) * | 1992-06-08 | 1998-11-24 | Ngk Insulators, Ltd. | Spalling-resistant, creep-resistant and oxidation-resistant setters |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS578794A (en) * | 1980-06-17 | 1982-01-18 | Mitsubishi Chem Ind Ltd | Preparation of androstane-type steroid |
| JPS59101195A (ja) * | 1982-11-30 | 1984-06-11 | シャープ株式会社 | 洗濯機 |
-
1984
- 1984-12-18 JP JP59267006A patent/JPS61143686A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS578794A (en) * | 1980-06-17 | 1982-01-18 | Mitsubishi Chem Ind Ltd | Preparation of androstane-type steroid |
| JPS59101195A (ja) * | 1982-11-30 | 1984-06-11 | シャープ株式会社 | 洗濯機 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2548542Y2 (ja) * | 1991-12-25 | 1997-09-24 | 博之 楓 | ポンプ循環式防錆剤供給装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61143686A (ja) | 1986-07-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4692418A (en) | Sintered silicon carbide/carbon composite ceramic body having fine microstructure | |
| US4525461A (en) | Sintered silicon carbide/graphite/carbon composite ceramic body having ultrafine grain microstructure | |
| EP0626358B1 (de) | Elektrisch leitende, hochfeste und dichte Keramik | |
| JPH0131471B2 (de) | ||
| JPS6228109B2 (de) | ||
| JPH0768066B2 (ja) | 耐熱性複合体及びその製造方法 | |
| US4564601A (en) | Shaped polycrystalline silicon carbide articles and isostatic hot-pressing process | |
| JPH0432030B2 (de) | ||
| JPH0359033B2 (de) | ||
| EP0178753B1 (de) | Verfahren zur Herstellung gesinterter Siliciumcarbid/Kohlenstoff-Verbundkeramikkörper mit ultrafeinem Kornmikrogefüge | |
| JPH0228539B2 (de) | ||
| JPH0157075B2 (de) | ||
| JP4382919B2 (ja) | シリコン含浸炭化珪素セラミックス部材の製造方法 | |
| JPS6152106B2 (de) | ||
| JPS632913B2 (de) | ||
| JPH034511B2 (de) | ||
| JPH034514B2 (de) | ||
| JPS6212663A (ja) | Ｂ４ｃ質複合体およびその製造方法 | |
| JPH031269B2 (de) | ||
| JP4542747B2 (ja) | 高強度六方晶窒化硼素焼結体の製法 | |
| JP3437194B2 (ja) | 耐酸化性Ｓｉ−ＳｉＣ質焼結体 | |
| JP2690774B2 (ja) | 多孔質炭化珪素焼結体及びその製造方法 | |
| JP3036207B2 (ja) | 窒化ケイ素焼結体の製造方法 | |
| JPH01115888A (ja) | 半導体製造用治具の製造方法 | |
| JP2000026177A (ja) | 珪素・炭化珪素セラミックスの製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |