JPH0358855B2 - - Google Patents

Info

Publication number
JPH0358855B2
JPH0358855B2 JP59204821A JP20482184A JPH0358855B2 JP H0358855 B2 JPH0358855 B2 JP H0358855B2 JP 59204821 A JP59204821 A JP 59204821A JP 20482184 A JP20482184 A JP 20482184A JP H0358855 B2 JPH0358855 B2 JP H0358855B2
Authority
JP
Japan
Prior art keywords
voltage
members
drive
fixed
fine movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59204821A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6182433A (ja
Inventor
Kazuyoshi Sugihara
Tooru Tojo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP59204821A priority Critical patent/JPS6182433A/ja
Publication of JPS6182433A publication Critical patent/JPS6182433A/ja
Publication of JPH0358855B2 publication Critical patent/JPH0358855B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59204821A 1984-09-29 1984-09-29 微動機構 Granted JPS6182433A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59204821A JPS6182433A (ja) 1984-09-29 1984-09-29 微動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59204821A JPS6182433A (ja) 1984-09-29 1984-09-29 微動機構

Publications (2)

Publication Number Publication Date
JPS6182433A JPS6182433A (ja) 1986-04-26
JPH0358855B2 true JPH0358855B2 (enExample) 1991-09-06

Family

ID=16496938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59204821A Granted JPS6182433A (ja) 1984-09-29 1984-09-29 微動機構

Country Status (1)

Country Link
JP (1) JPS6182433A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH064209B2 (ja) * 1987-10-06 1994-01-19 日本電気株式会社 位置決め機構
JPH064210B2 (ja) * 1987-10-20 1994-01-19 日本電気株式会社 位置決め機構

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157451A (en) * 1979-05-21 1980-12-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Positioning device
JPS58190079A (ja) * 1982-04-28 1983-11-05 Toshiba Corp 微動機構

Also Published As

Publication number Publication date
JPS6182433A (ja) 1986-04-26

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