JPS55157451A - Positioning device - Google Patents
Positioning deviceInfo
- Publication number
- JPS55157451A JPS55157451A JP6313279A JP6313279A JPS55157451A JP S55157451 A JPS55157451 A JP S55157451A JP 6313279 A JP6313279 A JP 6313279A JP 6313279 A JP6313279 A JP 6313279A JP S55157451 A JPS55157451 A JP S55157451A
- Authority
- JP
- Japan
- Prior art keywords
- telescopically
- cankerworm
- shifting
- clamp
- state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Jigs For Machine Tools (AREA)
Abstract
PURPOSE: To highly accurately perform a positioning operation, by aligning an objective position to the center of telescopic movement of a piezoelectric element which is telescopically actuated when performing the positioning operation.
CONSTITUTION: A cankerworm-like transfer mechanism 41 is constructed by a shifting rod 4 for a stage 53, telescopic elements 2 telescopically controlled in a shifting direction of the shifting rod 4 and a pair of clamp elements 1, 3 for allowing the shifting directional both end parts of said telescopic elements 2 to be selectively clamped to the shifting rod 4 or fixed part at an opposite time to each other. A cankerworm control unit 51 permits the telescopic elements 2 to be telescopically controlled almost continuously simultaneously with a switching control of the clamping state for each clamp element 1, 3. Further a detecting unit 54 detects the cankerworm-like transfer mechanism 41 for whether in the telescopically moving state or in the clamp switching state, thus to make a positioning of the stage 53 in an extension or contraction state.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6313279A JPS55157451A (en) | 1979-05-21 | 1979-05-21 | Positioning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6313279A JPS55157451A (en) | 1979-05-21 | 1979-05-21 | Positioning device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55157451A true JPS55157451A (en) | 1980-12-08 |
JPS6327135B2 JPS6327135B2 (en) | 1988-06-01 |
Family
ID=13220429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6313279A Granted JPS55157451A (en) | 1979-05-21 | 1979-05-21 | Positioning device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55157451A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6182433A (en) * | 1984-09-29 | 1986-04-26 | Toshiba Corp | Finely moving mechanism |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5172800A (en) * | 1974-07-26 | 1976-06-23 | Varian Techtron Pty Ltd | KUDOKIKO |
-
1979
- 1979-05-21 JP JP6313279A patent/JPS55157451A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5172800A (en) * | 1974-07-26 | 1976-06-23 | Varian Techtron Pty Ltd | KUDOKIKO |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6182433A (en) * | 1984-09-29 | 1986-04-26 | Toshiba Corp | Finely moving mechanism |
JPH0358855B2 (en) * | 1984-09-29 | 1991-09-06 | Tokyo Shibaura Electric Co |
Also Published As
Publication number | Publication date |
---|---|
JPS6327135B2 (en) | 1988-06-01 |
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