JPH0358184B2 - - Google Patents
Info
- Publication number
- JPH0358184B2 JPH0358184B2 JP58031188A JP3118883A JPH0358184B2 JP H0358184 B2 JPH0358184 B2 JP H0358184B2 JP 58031188 A JP58031188 A JP 58031188A JP 3118883 A JP3118883 A JP 3118883A JP H0358184 B2 JPH0358184 B2 JP H0358184B2
- Authority
- JP
- Japan
- Prior art keywords
- word line
- memory cell
- node
- memory device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000015654 memory Effects 0.000 claims description 105
- 229910052782 aluminium Inorganic materials 0.000 claims description 48
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 48
- 239000004065 semiconductor Substances 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 10
- 230000005669 field effect Effects 0.000 claims description 2
- 239000011159 matrix material Substances 0.000 claims description 2
- 230000000295 complement effect Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 28
- 239000010410 layer Substances 0.000 description 20
- 238000009792 diffusion process Methods 0.000 description 18
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000010187 selection method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C8/00—Arrangements for selecting an address in a digital store
- G11C8/14—Word line organisation; Word line lay-out
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C8/00—Arrangements for selecting an address in a digital store
- G11C8/12—Group selection circuits, e.g. for memory block selection, chip selection, array selection
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Static Random-Access Memory (AREA)
- Semiconductor Memories (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58031188A JPS59155954A (ja) | 1983-02-24 | 1983-02-24 | 半導体メモリ装置 |
US06/580,388 US4596003A (en) | 1983-02-24 | 1984-02-15 | Semiconductor memory |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58031188A JPS59155954A (ja) | 1983-02-24 | 1983-02-24 | 半導体メモリ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59155954A JPS59155954A (ja) | 1984-09-05 |
JPH0358184B2 true JPH0358184B2 (de) | 1991-09-04 |
Family
ID=12324457
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58031188A Granted JPS59155954A (ja) | 1983-02-24 | 1983-02-24 | 半導体メモリ装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US4596003A (de) |
JP (1) | JPS59155954A (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050797A (ja) * | 1983-08-31 | 1985-03-20 | Toshiba Corp | 半導体記憶装置 |
US4723228B1 (en) * | 1983-08-31 | 1998-04-21 | Texas Instruments Inc | Memory decoding circuitry |
JPS60109267A (ja) * | 1983-11-17 | 1985-06-14 | Fujitsu Ltd | スタテイツクram |
JPS63200391A (ja) * | 1987-02-16 | 1988-08-18 | Toshiba Corp | スタテイツク型半導体メモリ |
JP3026341B2 (ja) * | 1987-02-23 | 2000-03-27 | 株式会社日立製作所 | 半導体メモリ装置 |
US4797858A (en) * | 1987-03-30 | 1989-01-10 | Motorola, Inc. | Semiconductor memory with divided word lines and shared sense amplifiers |
US4910574A (en) * | 1987-04-30 | 1990-03-20 | Ibm Corporation | Porous circuit macro for semiconductor integrated circuits |
US5222047A (en) * | 1987-05-15 | 1993-06-22 | Mitsubishi Denki Kabushiki Kaisha | Method and apparatus for driving word line in block access memory |
US4849904A (en) * | 1987-06-19 | 1989-07-18 | International Business Machines Corporation | Macro structural arrangement and method for generating macros for VLSI semiconductor circuit devices |
KR100213602B1 (ko) * | 1988-05-13 | 1999-08-02 | 가나이 쓰도무 | 다이나믹형 반도체 기억장치 |
JPH02141993A (ja) * | 1988-11-21 | 1990-05-31 | Toshiba Corp | 半導体記憶装置 |
JP3058431B2 (ja) * | 1990-06-12 | 2000-07-04 | 株式会社東芝 | 半導体記憶装置 |
JP2994120B2 (ja) * | 1991-11-21 | 1999-12-27 | 株式会社東芝 | 半導体記憶装置 |
JPH10125070A (ja) * | 1996-10-23 | 1998-05-15 | Nec Corp | メモリ装置 |
JP4530527B2 (ja) | 2000-12-08 | 2010-08-25 | ルネサスエレクトロニクス株式会社 | スタティック型半導体記憶装置 |
JP6091083B2 (ja) * | 2011-05-20 | 2017-03-08 | 株式会社半導体エネルギー研究所 | 記憶装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4542485A (en) * | 1981-01-14 | 1985-09-17 | Tokyo Shibaura Denki Kabushiki Kaisha | Semiconductor integrated circuit |
-
1983
- 1983-02-24 JP JP58031188A patent/JPS59155954A/ja active Granted
-
1984
- 1984-02-15 US US06/580,388 patent/US4596003A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS59155954A (ja) | 1984-09-05 |
US4596003A (en) | 1986-06-17 |
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