JPH0358179B2 - - Google Patents

Info

Publication number
JPH0358179B2
JPH0358179B2 JP56154608A JP15460881A JPH0358179B2 JP H0358179 B2 JPH0358179 B2 JP H0358179B2 JP 56154608 A JP56154608 A JP 56154608A JP 15460881 A JP15460881 A JP 15460881A JP H0358179 B2 JPH0358179 B2 JP H0358179B2
Authority
JP
Japan
Prior art keywords
resist film
film
groove
grooves
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56154608A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5856353A (ja
Inventor
Junji Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56154608A priority Critical patent/JPS5856353A/ja
Publication of JPS5856353A publication Critical patent/JPS5856353A/ja
Publication of JPH0358179B2 publication Critical patent/JPH0358179B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/0121—
    • H10W10/13—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Drying Of Semiconductors (AREA)
  • Element Separation (AREA)
JP56154608A 1981-09-29 1981-09-29 アイソレ−シヨンの形成方法 Granted JPS5856353A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56154608A JPS5856353A (ja) 1981-09-29 1981-09-29 アイソレ−シヨンの形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56154608A JPS5856353A (ja) 1981-09-29 1981-09-29 アイソレ−シヨンの形成方法

Publications (2)

Publication Number Publication Date
JPS5856353A JPS5856353A (ja) 1983-04-04
JPH0358179B2 true JPH0358179B2 (OSRAM) 1991-09-04

Family

ID=15587895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56154608A Granted JPS5856353A (ja) 1981-09-29 1981-09-29 アイソレ−シヨンの形成方法

Country Status (1)

Country Link
JP (1) JPS5856353A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5192706A (en) * 1990-08-30 1993-03-09 Texas Instruments Incorporated Method for semiconductor isolation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53108773A (en) * 1977-03-04 1978-09-21 Matsushita Electric Ind Co Ltd Production of semiconductor device

Also Published As

Publication number Publication date
JPS5856353A (ja) 1983-04-04

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