JPH0357813B2 - - Google Patents
Info
- Publication number
- JPH0357813B2 JPH0357813B2 JP21163286A JP21163286A JPH0357813B2 JP H0357813 B2 JPH0357813 B2 JP H0357813B2 JP 21163286 A JP21163286 A JP 21163286A JP 21163286 A JP21163286 A JP 21163286A JP H0357813 B2 JPH0357813 B2 JP H0357813B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- chamber
- unloading
- loading
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012545 processing Methods 0.000 claims description 42
- 230000000903 blocking effect Effects 0.000 claims description 4
- 238000002955 isolation Methods 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 10
- 238000004140 cleaning Methods 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 9
- 238000012546 transfer Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000002265 prevention Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21163286A JPS6369533A (ja) | 1986-09-10 | 1986-09-10 | 連続真空処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21163286A JPS6369533A (ja) | 1986-09-10 | 1986-09-10 | 連続真空処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6369533A JPS6369533A (ja) | 1988-03-29 |
| JPH0357813B2 true JPH0357813B2 (enrdf_load_stackoverflow) | 1991-09-03 |
Family
ID=16608990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21163286A Granted JPS6369533A (ja) | 1986-09-10 | 1986-09-10 | 連続真空処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6369533A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04125222A (ja) * | 1990-09-17 | 1992-04-24 | Kokusai Electric Co Ltd | 真空装置用縦型トレイ搬送機構 |
-
1986
- 1986-09-10 JP JP21163286A patent/JPS6369533A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6369533A (ja) | 1988-03-29 |
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