JPH0357632B2 - - Google Patents

Info

Publication number
JPH0357632B2
JPH0357632B2 JP18552688A JP18552688A JPH0357632B2 JP H0357632 B2 JPH0357632 B2 JP H0357632B2 JP 18552688 A JP18552688 A JP 18552688A JP 18552688 A JP18552688 A JP 18552688A JP H0357632 B2 JPH0357632 B2 JP H0357632B2
Authority
JP
Japan
Prior art keywords
gas laser
laser
light
halogen
halogen donor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18552688A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0236583A (ja
Inventor
Yutaka Uchida
Tsutomu Sumino
Saburo Sato
Tatsumi Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP18552688A priority Critical patent/JPH0236583A/ja
Publication of JPH0236583A publication Critical patent/JPH0236583A/ja
Publication of JPH0357632B2 publication Critical patent/JPH0357632B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP18552688A 1988-07-27 1988-07-27 エキシマガスレーザ発振装置 Granted JPH0236583A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18552688A JPH0236583A (ja) 1988-07-27 1988-07-27 エキシマガスレーザ発振装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18552688A JPH0236583A (ja) 1988-07-27 1988-07-27 エキシマガスレーザ発振装置

Publications (2)

Publication Number Publication Date
JPH0236583A JPH0236583A (ja) 1990-02-06
JPH0357632B2 true JPH0357632B2 (enrdf_load_stackoverflow) 1991-09-02

Family

ID=16172342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18552688A Granted JPH0236583A (ja) 1988-07-27 1988-07-27 エキシマガスレーザ発振装置

Country Status (1)

Country Link
JP (1) JPH0236583A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6490307B1 (en) * 1999-03-17 2002-12-03 Lambda Physik Ag Method and procedure to automatically stabilize excimer laser output parameters
JP2007239213A (ja) * 2006-03-06 2007-09-20 Toyo Exterior Co Ltd 折畳戸のロック装置

Also Published As

Publication number Publication date
JPH0236583A (ja) 1990-02-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term