JPH0357621B2 - - Google Patents
Info
- Publication number
- JPH0357621B2 JPH0357621B2 JP14387683A JP14387683A JPH0357621B2 JP H0357621 B2 JPH0357621 B2 JP H0357621B2 JP 14387683 A JP14387683 A JP 14387683A JP 14387683 A JP14387683 A JP 14387683A JP H0357621 B2 JPH0357621 B2 JP H0357621B2
- Authority
- JP
- Japan
- Prior art keywords
- contact
- positioning
- inclined surface
- jig
- link bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000008188 pellet Substances 0.000 description 36
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14387683A JPS6035530A (ja) | 1983-08-08 | 1983-08-08 | ボンディング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14387683A JPS6035530A (ja) | 1983-08-08 | 1983-08-08 | ボンディング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6035530A JPS6035530A (ja) | 1985-02-23 |
| JPH0357621B2 true JPH0357621B2 (enrdf_load_stackoverflow) | 1991-09-02 |
Family
ID=15349058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14387683A Granted JPS6035530A (ja) | 1983-08-08 | 1983-08-08 | ボンディング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6035530A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59146531U (ja) * | 1983-12-28 | 1984-09-29 | ダイキン工業株式会社 | 過給機付エンジンの吸入空気冷却装置 |
| JPH021427U (enrdf_load_stackoverflow) * | 1988-06-13 | 1990-01-08 |
-
1983
- 1983-08-08 JP JP14387683A patent/JPS6035530A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6035530A (ja) | 1985-02-23 |
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