JPH0356407B2 - - Google Patents

Info

Publication number
JPH0356407B2
JPH0356407B2 JP58143926A JP14392683A JPH0356407B2 JP H0356407 B2 JPH0356407 B2 JP H0356407B2 JP 58143926 A JP58143926 A JP 58143926A JP 14392683 A JP14392683 A JP 14392683A JP H0356407 B2 JPH0356407 B2 JP H0356407B2
Authority
JP
Japan
Prior art keywords
support
terminal
resistive layer
terminals
medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58143926A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5948620A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5948620A publication Critical patent/JPS5948620A/ja
Publication of JPH0356407B2 publication Critical patent/JPH0356407B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP58143926A 1982-08-11 1983-08-08 流動媒体の質量流量を測定する装置及び該装置の製造法 Granted JPS5948620A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3229844.7 1982-08-11
DE19823229844 DE3229844A1 (de) 1982-08-11 1982-08-11 Vorrichtung zur messung der masse eines stroemenden mediums und verfahren zur herstellung einer vorrichtung zur messung der masse eines stroemenden mediums

Publications (2)

Publication Number Publication Date
JPS5948620A JPS5948620A (ja) 1984-03-19
JPH0356407B2 true JPH0356407B2 (enExample) 1991-08-28

Family

ID=6170584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58143926A Granted JPS5948620A (ja) 1982-08-11 1983-08-08 流動媒体の質量流量を測定する装置及び該装置の製造法

Country Status (3)

Country Link
US (1) US4616506A (enExample)
JP (1) JPS5948620A (enExample)
DE (1) DE3229844A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5576488A (en) * 1994-11-21 1996-11-19 The United States Of America As Represented By The United States National Aeronautics And Space Administration Micro-sensor thin-film anemometer
US9184327B2 (en) * 2006-10-03 2015-11-10 Sunpower Corporation Formed photovoltaic module busbars
US20090139557A1 (en) * 2007-11-30 2009-06-04 Douglas Rose Busbar connection configuration to accommodate for cell misalignment
US9029689B2 (en) 2010-12-23 2015-05-12 Sunpower Corporation Method for connecting solar cells
US20230319971A1 (en) * 2022-03-30 2023-10-05 Applied Materials, Inc. Methods of manufacturing plasma generating cells for a plasma source

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3452432A (en) * 1963-10-03 1969-07-01 Corning Glass Works Method of making an electrical component
US3452314A (en) * 1967-05-22 1969-06-24 Victory Eng Corp Low noise thermistor assembly and method
US3626353A (en) * 1968-12-27 1971-12-07 Corning Glass Works Fused substrate resistor
US3592055A (en) * 1969-02-12 1971-07-13 Thermo Systems Inc Directional sensor
US3900819A (en) * 1973-02-07 1975-08-19 Environmental Instruments Thermal directional fluid flow transducer
US4024761A (en) * 1976-06-11 1977-05-24 Kyma Corporation Directional hot film anemometer transducer
DE2728060A1 (de) * 1977-06-22 1979-01-18 Bosch Gmbh Robert Messonde mit temperaturabhaengigem widerstand zur mengenmessung
DE2804850C2 (de) * 1978-02-04 1983-11-17 Degussa Ag, 6000 Frankfurt Vorrichtung zur Messung der Strömungsgeschwindigkeit von Gasen
JPS54145166A (en) * 1978-04-10 1979-11-13 Hitachi Ltd Measuring apparatus of suction air flow rates
JPS5816602B2 (ja) * 1979-02-09 1983-04-01 ティーディーケイ株式会社 電圧非直線性抵抗素子
JPS5618721A (en) * 1979-07-24 1981-02-21 Hitachi Ltd Air flow meter
JPS56106159A (en) * 1980-01-28 1981-08-24 Hitachi Ltd Production of sensor for detecting flow speed and flow rate
US4396899A (en) * 1980-04-16 1983-08-02 Kabushiki Kaisha Kirk Platinum thin film resistance element and production method therefor
JPS57173758A (en) * 1981-04-20 1982-10-26 Hitachi Ltd Hot wire type current meter

Also Published As

Publication number Publication date
DE3229844A1 (de) 1984-02-16
US4616506A (en) 1986-10-14
JPS5948620A (ja) 1984-03-19

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