JPH0355829Y2 - - Google Patents

Info

Publication number
JPH0355829Y2
JPH0355829Y2 JP1986108575U JP10857586U JPH0355829Y2 JP H0355829 Y2 JPH0355829 Y2 JP H0355829Y2 JP 1986108575 U JP1986108575 U JP 1986108575U JP 10857586 U JP10857586 U JP 10857586U JP H0355829 Y2 JPH0355829 Y2 JP H0355829Y2
Authority
JP
Japan
Prior art keywords
adsorbent
cryopanel
temperature
gas
cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986108575U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6314878U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986108575U priority Critical patent/JPH0355829Y2/ja
Publication of JPS6314878U publication Critical patent/JPS6314878U/ja
Application granted granted Critical
Publication of JPH0355829Y2 publication Critical patent/JPH0355829Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1986108575U 1986-07-15 1986-07-15 Expired JPH0355829Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986108575U JPH0355829Y2 (OSRAM) 1986-07-15 1986-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986108575U JPH0355829Y2 (OSRAM) 1986-07-15 1986-07-15

Publications (2)

Publication Number Publication Date
JPS6314878U JPS6314878U (OSRAM) 1988-01-30
JPH0355829Y2 true JPH0355829Y2 (OSRAM) 1991-12-12

Family

ID=30985895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986108575U Expired JPH0355829Y2 (OSRAM) 1986-07-15 1986-07-15

Country Status (1)

Country Link
JP (1) JPH0355829Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009275672A (ja) * 2008-05-16 2009-11-26 Sumitomo Heavy Ind Ltd クライオポンプ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6053588B2 (ja) * 2013-03-19 2016-12-27 住友重機械工業株式会社 クライオポンプ、及び非凝縮性気体の真空排気方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910040A (ja) * 1982-07-09 1984-01-19 Hitachi Ltd スペ−ス・ダイバ−シテイ受信機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009275672A (ja) * 2008-05-16 2009-11-26 Sumitomo Heavy Ind Ltd クライオポンプ

Also Published As

Publication number Publication date
JPS6314878U (OSRAM) 1988-01-30

Similar Documents

Publication Publication Date Title
CA1070130A (en) Cryopumping method and apparatus
GB2115602A (en) Getters in infra-red radiation detectors
US5857340A (en) Passive frequency stabilization in an acoustic resonator
US6122920A (en) High specific surface area aerogel cryoadsorber for vacuum pumping applications
US4966016A (en) Cryopump with multiple refrigerators
EP0128323A2 (en) Cryopump with improved adsorption capacity
US5345787A (en) Miniature cryosorption vacuum pump
JPH0355829Y2 (OSRAM)
JP2763524B2 (ja) 二次ポンプ装置
JPH0214554B2 (OSRAM)
JPS6157473B2 (OSRAM)
EP0506133B1 (en) A cryopump
JP4504476B2 (ja) 分子ポンプ
WO1999064797A1 (fr) Machine de refrigeration de conduit a impulsions et pompe cryogenique utilisant cette machine de refrigeration
JPS58131381A (ja) クライオポンプ及びクライオポンプ用冷凍機
JPH10122144A (ja) クライオトラップ
JPH031053A (ja) 冷凍機
US4896511A (en) Optimally staged cryopump
JP3604228B2 (ja) 真空排気装置
KR20200123100A (ko) 크라이오펌프
JPH0235873B2 (ja) Kuraiohonpu
JPH08135570A (ja) クライオポンプ及びコールドトラップ
JP3288564B2 (ja) 冷凍機
JPS6248974A (ja) クライオポンプ
KR100374826B1 (ko) 극저온 냉동기의 단열구조