JPH0354428B2 - - Google Patents

Info

Publication number
JPH0354428B2
JPH0354428B2 JP57184611A JP18461182A JPH0354428B2 JP H0354428 B2 JPH0354428 B2 JP H0354428B2 JP 57184611 A JP57184611 A JP 57184611A JP 18461182 A JP18461182 A JP 18461182A JP H0354428 B2 JPH0354428 B2 JP H0354428B2
Authority
JP
Japan
Prior art keywords
sample
samples
mass spectrometer
ions
primary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57184611A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5975551A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57184611A priority Critical patent/JPS5975551A/ja
Publication of JPS5975551A publication Critical patent/JPS5975551A/ja
Publication of JPH0354428B2 publication Critical patent/JPH0354428B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP57184611A 1982-10-22 1982-10-22 質量分析装置 Granted JPS5975551A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57184611A JPS5975551A (ja) 1982-10-22 1982-10-22 質量分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57184611A JPS5975551A (ja) 1982-10-22 1982-10-22 質量分析装置

Publications (2)

Publication Number Publication Date
JPS5975551A JPS5975551A (ja) 1984-04-28
JPH0354428B2 true JPH0354428B2 (OSRAM) 1991-08-20

Family

ID=16156243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57184611A Granted JPS5975551A (ja) 1982-10-22 1982-10-22 質量分析装置

Country Status (1)

Country Link
JP (1) JPS5975551A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251144A (ja) * 1985-08-29 1987-03-05 Hitachi Ltd 質量分析計

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53135260A (en) * 1977-04-30 1978-11-25 Hitachi Ltd Sample stage of e lectron microscope or the like

Also Published As

Publication number Publication date
JPS5975551A (ja) 1984-04-28

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