JPH035413Y2 - - Google Patents

Info

Publication number
JPH035413Y2
JPH035413Y2 JP1983078037U JP7803783U JPH035413Y2 JP H035413 Y2 JPH035413 Y2 JP H035413Y2 JP 1983078037 U JP1983078037 U JP 1983078037U JP 7803783 U JP7803783 U JP 7803783U JP H035413 Y2 JPH035413 Y2 JP H035413Y2
Authority
JP
Japan
Prior art keywords
pad
base
pad mounting
mounting board
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983078037U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59183748U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983078037U priority Critical patent/JPS59183748U/ja
Publication of JPS59183748U publication Critical patent/JPS59183748U/ja
Application granted granted Critical
Publication of JPH035413Y2 publication Critical patent/JPH035413Y2/ja
Granted legal-status Critical Current

Links

JP1983078037U 1983-05-24 1983-05-24 平面研削用定盤 Granted JPS59183748U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983078037U JPS59183748U (ja) 1983-05-24 1983-05-24 平面研削用定盤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983078037U JPS59183748U (ja) 1983-05-24 1983-05-24 平面研削用定盤

Publications (2)

Publication Number Publication Date
JPS59183748U JPS59183748U (ja) 1984-12-07
JPH035413Y2 true JPH035413Y2 (cg-RX-API-DMAC7.html) 1991-02-12

Family

ID=30208047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983078037U Granted JPS59183748U (ja) 1983-05-24 1983-05-24 平面研削用定盤

Country Status (1)

Country Link
JP (1) JPS59183748U (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995029039A1 (en) * 1994-04-22 1995-11-02 Kabushiki Kaisha Toshiba Separation type grinding surface plate and grinding apparatus using same

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2821151B2 (ja) * 1988-11-11 1998-11-05 株式会社日立製作所 硬脆材料のラッピング方法
JP4680314B1 (ja) * 2010-02-04 2011-05-11 東邦エンジニアリング株式会社 研磨パッド用補助板およびそれを用いた研磨パッドの再生方法
JP5568745B2 (ja) * 2010-12-08 2014-08-13 東邦エンジニアリング株式会社 研磨パッドの再生方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53161395U (cg-RX-API-DMAC7.html) * 1977-05-26 1978-12-18
JPS57156166A (en) * 1981-03-20 1982-09-27 Hitachi Ltd Lapping equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995029039A1 (en) * 1994-04-22 1995-11-02 Kabushiki Kaisha Toshiba Separation type grinding surface plate and grinding apparatus using same

Also Published As

Publication number Publication date
JPS59183748U (ja) 1984-12-07

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