JPH0353402Y2 - - Google Patents
Info
- Publication number
- JPH0353402Y2 JPH0353402Y2 JP1987058775U JP5877587U JPH0353402Y2 JP H0353402 Y2 JPH0353402 Y2 JP H0353402Y2 JP 1987058775 U JP1987058775 U JP 1987058775U JP 5877587 U JP5877587 U JP 5877587U JP H0353402 Y2 JPH0353402 Y2 JP H0353402Y2
- Authority
- JP
- Japan
- Prior art keywords
- slit
- extraction electrode
- extraction
- electrode
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000605 extraction Methods 0.000 claims description 62
- 238000010884 ion-beam technique Methods 0.000 claims description 22
- 150000002500 ions Chemical class 0.000 description 25
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 17
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 17
- 238000005468 ion implantation Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000004949 mass spectrometry Methods 0.000 description 3
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910015900 BF3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000005372 isotope separation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987058775U JPH0353402Y2 (ko) | 1987-04-20 | 1987-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987058775U JPH0353402Y2 (ko) | 1987-04-20 | 1987-04-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63165750U JPS63165750U (ko) | 1988-10-28 |
| JPH0353402Y2 true JPH0353402Y2 (ko) | 1991-11-21 |
Family
ID=30889648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987058775U Expired JPH0353402Y2 (ko) | 1987-04-20 | 1987-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353402Y2 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9281160B2 (en) | 2013-05-31 | 2016-03-08 | Sumitomo Heavy Industries Ion Technology Co., Ltd. | Insulation structure and insulation method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1683163B1 (en) * | 2003-10-17 | 2012-02-22 | Fei Company | Charged particle extraction device and method |
| JP6388520B2 (ja) * | 2014-10-17 | 2018-09-12 | 住友重機械イオンテクノロジー株式会社 | ビーム引出スリット構造、イオン源、及びイオン注入装置 |
-
1987
- 1987-04-20 JP JP1987058775U patent/JPH0353402Y2/ja not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| PROCEEDINGS OF THE INTERNATIONAL ION ENGINEERING CONGRESS=1983 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9281160B2 (en) | 2013-05-31 | 2016-03-08 | Sumitomo Heavy Industries Ion Technology Co., Ltd. | Insulation structure and insulation method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63165750U (ko) | 1988-10-28 |
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