JPH0352649B2 - - Google Patents
Info
- Publication number
- JPH0352649B2 JPH0352649B2 JP59112961A JP11296184A JPH0352649B2 JP H0352649 B2 JPH0352649 B2 JP H0352649B2 JP 59112961 A JP59112961 A JP 59112961A JP 11296184 A JP11296184 A JP 11296184A JP H0352649 B2 JPH0352649 B2 JP H0352649B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic disk
- coating film
- light
- coating
- foreign matter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000576 coating method Methods 0.000 claims description 111
- 239000011248 coating agent Substances 0.000 claims description 110
- 238000001514 detection method Methods 0.000 claims description 55
- 230000007547 defect Effects 0.000 claims description 52
- 238000000034 method Methods 0.000 claims description 40
- 238000007689 inspection Methods 0.000 claims description 34
- 238000005286 illumination Methods 0.000 claims description 32
- 238000006243 chemical reaction Methods 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 7
- 239000002904 solvent Substances 0.000 claims description 7
- 230000003213 activating effect Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 20
- 239000003973 paint Substances 0.000 description 17
- 239000000428 dust Substances 0.000 description 12
- 230000002950 deficient Effects 0.000 description 10
- 238000003384 imaging method Methods 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001651 emery Inorganic materials 0.000 description 1
- 239000005338 frosted glass Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11296184A JPS60258729A (ja) | 1984-06-04 | 1984-06-04 | 磁気デイスク塗膜の検査方法及びその装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11296184A JPS60258729A (ja) | 1984-06-04 | 1984-06-04 | 磁気デイスク塗膜の検査方法及びその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60258729A JPS60258729A (ja) | 1985-12-20 |
JPH0352649B2 true JPH0352649B2 (de) | 1991-08-12 |
Family
ID=14599866
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11296184A Granted JPS60258729A (ja) | 1984-06-04 | 1984-06-04 | 磁気デイスク塗膜の検査方法及びその装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60258729A (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0736271Y2 (ja) * | 1989-04-28 | 1995-08-16 | ホーヤ株式会社 | 円盤体の欠陥検査装置 |
KR100944425B1 (ko) | 2008-04-29 | 2010-02-25 | 주식회사 포스코 | 강판 표면의 결함마크 검출 장치 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5794636A (en) * | 1980-12-05 | 1982-06-12 | Fujitsu Ltd | Defect detecting device of disk substrate |
JPS6057241A (ja) * | 1983-09-09 | 1985-04-03 | Victor Co Of Japan Ltd | 円盤状情報記録媒体の欠陥検査方法及びその装置 |
-
1984
- 1984-06-04 JP JP11296184A patent/JPS60258729A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5794636A (en) * | 1980-12-05 | 1982-06-12 | Fujitsu Ltd | Defect detecting device of disk substrate |
JPS6057241A (ja) * | 1983-09-09 | 1985-04-03 | Victor Co Of Japan Ltd | 円盤状情報記録媒体の欠陥検査方法及びその装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS60258729A (ja) | 1985-12-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4469442A (en) | Detecting irregularities in a coating on a substrate | |
US4674875A (en) | Method and apparatus for inspecting surface defects on the magnetic disk file memories | |
JPH0786470B2 (ja) | ディスク表面検査方法及び装置 | |
JPS63261144A (ja) | 光学的ウエブモニター装置 | |
JPH06294749A (ja) | 板ガラスの欠点検査方法 | |
JPH06241758A (ja) | 欠陥検査装置 | |
JPH09257720A (ja) | 欠陥検査方法とその装置 | |
JPH0352649B2 (de) | ||
JPH07239304A (ja) | 表面層欠陥検出装置 | |
JP3025946B2 (ja) | 物体表面の粗さ測定方法及び装置 | |
JP3267062B2 (ja) | 表面層欠陥検出装置 | |
JP2712940B2 (ja) | 表面層欠陥検出装置 | |
JP3108428B2 (ja) | 透明体円形ワークの欠陥検出装置 | |
JPH0311403B2 (de) | ||
JP2002005845A (ja) | 欠陥検査装置 | |
JPS6069539A (ja) | 表面欠陥検査装置 | |
JPS63218847A (ja) | 表面欠陥検査方法 | |
JPS6180009A (ja) | 磁気デイスクの表面欠陥検査方法および装置 | |
JPH10142160A (ja) | 光学的検査方法とその装置 | |
JP3326276B2 (ja) | 光学ディスクの保護コート膜検査方法及びそれを使用した検査装置 | |
JPH0755710A (ja) | 感光体ドラムの欠陥検査装置 | |
JPH09218162A (ja) | 表面欠陥検査装置 | |
JPH07270336A (ja) | 欠陥検査装置 | |
JP3109709B2 (ja) | 光学ディスクの保護コート膜検査方法及びそれを使用した検査装置 | |
JPH01214743A (ja) | 光学検査装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |