JPH0350833B2 - - Google Patents

Info

Publication number
JPH0350833B2
JPH0350833B2 JP58224977A JP22497783A JPH0350833B2 JP H0350833 B2 JPH0350833 B2 JP H0350833B2 JP 58224977 A JP58224977 A JP 58224977A JP 22497783 A JP22497783 A JP 22497783A JP H0350833 B2 JPH0350833 B2 JP H0350833B2
Authority
JP
Japan
Prior art keywords
gear
planetary gears
point
fixed gear
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58224977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60116775A (ja
Inventor
Yoshikazu Sakashita
Shunji Inamura
Kazuyuki Suganuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Electronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Electronic Corp filed Critical Pioneer Electronic Corp
Priority to JP22497783A priority Critical patent/JPS60116775A/ja
Publication of JPS60116775A publication Critical patent/JPS60116775A/ja
Publication of JPH0350833B2 publication Critical patent/JPH0350833B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP22497783A 1983-11-28 1983-11-28 蒸着処理装置 Granted JPS60116775A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22497783A JPS60116775A (ja) 1983-11-28 1983-11-28 蒸着処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22497783A JPS60116775A (ja) 1983-11-28 1983-11-28 蒸着処理装置

Publications (2)

Publication Number Publication Date
JPS60116775A JPS60116775A (ja) 1985-06-24
JPH0350833B2 true JPH0350833B2 (en, 2012) 1991-08-02

Family

ID=16822164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22497783A Granted JPS60116775A (ja) 1983-11-28 1983-11-28 蒸着処理装置

Country Status (1)

Country Link
JP (1) JPS60116775A (en, 2012)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150047463A1 (en) 2012-06-26 2015-02-19 California Institute Of Technology Systems and methods for implementing bulk metallic glass-based macroscale gears
US9640359B2 (en) * 2012-08-09 2017-05-02 Vactronix Scientific, Inc. Inverted cylindrical magnetron (ICM) system and methods of use
JP6000173B2 (ja) * 2013-03-19 2016-09-28 株式会社神戸製鋼所 Ｐｖｄ処理装置及びｐｖｄ処理方法
US20140342179A1 (en) 2013-04-12 2014-11-20 California Institute Of Technology Systems and methods for shaping sheet materials that include metallic glass-based materials
US10151377B2 (en) 2015-03-05 2018-12-11 California Institute Of Technology Systems and methods for implementing tailored metallic glass-based strain wave gears and strain wave gear components
US10968527B2 (en) 2015-11-12 2021-04-06 California Institute Of Technology Method for embedding inserts, fasteners and features into metal core truss panels
JP2020512482A (ja) 2017-03-10 2020-04-23 カリフォルニア インスティチュート オブ テクノロジー 金属積層造形を用いた波動歯車フレクスプラインの製造方法
EP3630395A4 (en) 2017-05-24 2020-11-25 California Institute of Technology HYPOEUTECTIC AMORPHIC METAL BASED MATERIALS FOR ADDITIVE MANUFACTURING
US11123797B2 (en) 2017-06-02 2021-09-21 California Institute Of Technology High toughness metallic glass-based composites for additive manufacturing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6020065B2 (ja) * 1981-06-12 1985-05-20 松下電工株式会社 物品保持治具

Also Published As

Publication number Publication date
JPS60116775A (ja) 1985-06-24

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