JPH0350152B2 - - Google Patents

Info

Publication number
JPH0350152B2
JPH0350152B2 JP29748386A JP29748386A JPH0350152B2 JP H0350152 B2 JPH0350152 B2 JP H0350152B2 JP 29748386 A JP29748386 A JP 29748386A JP 29748386 A JP29748386 A JP 29748386A JP H0350152 B2 JPH0350152 B2 JP H0350152B2
Authority
JP
Japan
Prior art keywords
fluid
piezoelectric
valve body
valve
deflection element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP29748386A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63152783A (ja
Inventor
Takenobu Matsumura
Keiichi Furuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP29748386A priority Critical patent/JPS63152783A/ja
Publication of JPS63152783A publication Critical patent/JPS63152783A/ja
Publication of JPH0350152B2 publication Critical patent/JPH0350152B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP29748386A 1986-12-16 1986-12-16 圧電式選択バルブおよびその駆動方法 Granted JPS63152783A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29748386A JPS63152783A (ja) 1986-12-16 1986-12-16 圧電式選択バルブおよびその駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29748386A JPS63152783A (ja) 1986-12-16 1986-12-16 圧電式選択バルブおよびその駆動方法

Publications (2)

Publication Number Publication Date
JPS63152783A JPS63152783A (ja) 1988-06-25
JPH0350152B2 true JPH0350152B2 (enExample) 1991-07-31

Family

ID=17847083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29748386A Granted JPS63152783A (ja) 1986-12-16 1986-12-16 圧電式選択バルブおよびその駆動方法

Country Status (1)

Country Link
JP (1) JPS63152783A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT396392B (de) * 1991-09-30 1993-08-25 Hoerbiger Fluidtechnik Gmbh Piezo-ventil

Also Published As

Publication number Publication date
JPS63152783A (ja) 1988-06-25

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees