JPS63152783A - 圧電式選択バルブおよびその駆動方法 - Google Patents

圧電式選択バルブおよびその駆動方法

Info

Publication number
JPS63152783A
JPS63152783A JP29748386A JP29748386A JPS63152783A JP S63152783 A JPS63152783 A JP S63152783A JP 29748386 A JP29748386 A JP 29748386A JP 29748386 A JP29748386 A JP 29748386A JP S63152783 A JPS63152783 A JP S63152783A
Authority
JP
Japan
Prior art keywords
piezoelectric
fluid
valve
chamber
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29748386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0350152B2 (enExample
Inventor
Takenobu Matsumura
武宣 松村
Keiichi Furuta
圭一 古田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP29748386A priority Critical patent/JPS63152783A/ja
Publication of JPS63152783A publication Critical patent/JPS63152783A/ja
Publication of JPH0350152B2 publication Critical patent/JPH0350152B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP29748386A 1986-12-16 1986-12-16 圧電式選択バルブおよびその駆動方法 Granted JPS63152783A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29748386A JPS63152783A (ja) 1986-12-16 1986-12-16 圧電式選択バルブおよびその駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29748386A JPS63152783A (ja) 1986-12-16 1986-12-16 圧電式選択バルブおよびその駆動方法

Publications (2)

Publication Number Publication Date
JPS63152783A true JPS63152783A (ja) 1988-06-25
JPH0350152B2 JPH0350152B2 (enExample) 1991-07-31

Family

ID=17847083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29748386A Granted JPS63152783A (ja) 1986-12-16 1986-12-16 圧電式選択バルブおよびその駆動方法

Country Status (1)

Country Link
JP (1) JPS63152783A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5343894A (en) * 1991-09-30 1994-09-06 Hoerbiger Ventilwerke Aktiengesellschaft Piezo valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5343894A (en) * 1991-09-30 1994-09-06 Hoerbiger Ventilwerke Aktiengesellschaft Piezo valve

Also Published As

Publication number Publication date
JPH0350152B2 (enExample) 1991-07-31

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees