JPH03501474A - 化学蒸着用温度制御分配ビーム - Google Patents

化学蒸着用温度制御分配ビーム

Info

Publication number
JPH03501474A
JPH03501474A JP1510126A JP51012689A JPH03501474A JP H03501474 A JPH03501474 A JP H03501474A JP 1510126 A JP1510126 A JP 1510126A JP 51012689 A JP51012689 A JP 51012689A JP H03501474 A JPH03501474 A JP H03501474A
Authority
JP
Japan
Prior art keywords
block
glass plate
support
thermocouple
threaded fastener
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1510126A
Other languages
English (en)
Japanese (ja)
Inventor
グリーンバーグ、ウィリアム・エム
ボーマン、ランドール・エル
Original Assignee
リビー‐オーウェンズ‐フォード・カンパニー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by リビー‐オーウェンズ‐フォード・カンパニー filed Critical リビー‐オーウェンズ‐フォード・カンパニー
Publication of JPH03501474A publication Critical patent/JPH03501474A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
JP1510126A 1988-09-16 1989-09-12 化学蒸着用温度制御分配ビーム Pending JPH03501474A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US24544488A 1988-09-16 1988-09-16
US245,444 1988-09-16

Publications (1)

Publication Number Publication Date
JPH03501474A true JPH03501474A (ja) 1991-04-04

Family

ID=22926680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1510126A Pending JPH03501474A (ja) 1988-09-16 1989-09-12 化学蒸着用温度制御分配ビーム

Country Status (11)

Country Link
EP (1) EP0391996A4 (enrdf_load_stackoverflow)
JP (1) JPH03501474A (enrdf_load_stackoverflow)
KR (1) KR900702073A (enrdf_load_stackoverflow)
AU (1) AU618412B2 (enrdf_load_stackoverflow)
BR (1) BR8907091A (enrdf_load_stackoverflow)
CA (1) CA1332281C (enrdf_load_stackoverflow)
ES (1) ES2015459A6 (enrdf_load_stackoverflow)
FI (1) FI902414A7 (enrdf_load_stackoverflow)
MX (1) MX171806B (enrdf_load_stackoverflow)
TW (1) TW239165B (enrdf_load_stackoverflow)
WO (1) WO1990002826A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007323820A (ja) * 2006-05-30 2007-12-13 Sekisui Chem Co Ltd プラズマ処理装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2672519B1 (fr) * 1991-02-13 1995-04-28 Saint Gobain Vitrage Int Buse a talon aval sureleve, pour deposer une couche de revetement sur un ruban de verre, par pyrolyse d'un melange gazeux.
US5863337A (en) * 1993-02-16 1999-01-26 Ppg Industries, Inc. Apparatus for coating a moving glass substrate
US5599387A (en) * 1993-02-16 1997-02-04 Ppg Industries, Inc. Compounds and compositions for coating glass with silicon oxide
US5356718A (en) * 1993-02-16 1994-10-18 Ppg Industries, Inc. Coating apparatus, method of coating glass, compounds and compositions for coating glasss and coated glass substrates
US6164557A (en) * 1998-04-30 2000-12-26 Sioux Steam Cleaner Corporation Fluid temperature control for a heated fluid cleaner with multiple outlets

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4100962A (en) * 1977-02-28 1978-07-18 James H. Housman Casting die
US4793282A (en) * 1987-05-18 1988-12-27 Libbey-Owens-Ford Co. Distributor beam for chemical vapor deposition on glass

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007323820A (ja) * 2006-05-30 2007-12-13 Sekisui Chem Co Ltd プラズマ処理装置

Also Published As

Publication number Publication date
ES2015459A6 (es) 1990-08-16
EP0391996A4 (en) 1991-07-31
BR8907091A (pt) 1991-01-08
MX171806B (es) 1993-11-15
FI902414A0 (fi) 1990-05-15
WO1990002826A1 (en) 1990-03-22
AU4308489A (en) 1990-04-02
AU618412B2 (en) 1991-12-19
FI902414A7 (fi) 1990-05-15
KR900702073A (ko) 1990-12-05
CA1332281C (en) 1994-10-11
TW239165B (enrdf_load_stackoverflow) 1995-01-21
EP0391996A1 (en) 1990-10-17

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