CA1332281C - Temperature controlled distributor beam for chemical vapor deposition - Google Patents

Temperature controlled distributor beam for chemical vapor deposition

Info

Publication number
CA1332281C
CA1332281C CA000610445A CA610445A CA1332281C CA 1332281 C CA1332281 C CA 1332281C CA 000610445 A CA000610445 A CA 000610445A CA 610445 A CA610445 A CA 610445A CA 1332281 C CA1332281 C CA 1332281C
Authority
CA
Canada
Prior art keywords
blocks
block
support
insulating material
threaded fastener
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA000610445A
Other languages
English (en)
French (fr)
Inventor
Randall L. Bauman
William M. Greenberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington North America Inc
Original Assignee
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Co filed Critical Libbey Owens Ford Co
Application granted granted Critical
Publication of CA1332281C publication Critical patent/CA1332281C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
CA000610445A 1988-09-16 1989-09-06 Temperature controlled distributor beam for chemical vapor deposition Expired - Fee Related CA1332281C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US24544488A 1988-09-16 1988-09-16
US245,444 1988-09-16

Publications (1)

Publication Number Publication Date
CA1332281C true CA1332281C (en) 1994-10-11

Family

ID=22926680

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000610445A Expired - Fee Related CA1332281C (en) 1988-09-16 1989-09-06 Temperature controlled distributor beam for chemical vapor deposition

Country Status (11)

Country Link
EP (1) EP0391996A4 (enrdf_load_stackoverflow)
JP (1) JPH03501474A (enrdf_load_stackoverflow)
KR (1) KR900702073A (enrdf_load_stackoverflow)
AU (1) AU618412B2 (enrdf_load_stackoverflow)
BR (1) BR8907091A (enrdf_load_stackoverflow)
CA (1) CA1332281C (enrdf_load_stackoverflow)
ES (1) ES2015459A6 (enrdf_load_stackoverflow)
FI (1) FI902414A7 (enrdf_load_stackoverflow)
MX (1) MX171806B (enrdf_load_stackoverflow)
TW (1) TW239165B (enrdf_load_stackoverflow)
WO (1) WO1990002826A1 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2672519B1 (fr) * 1991-02-13 1995-04-28 Saint Gobain Vitrage Int Buse a talon aval sureleve, pour deposer une couche de revetement sur un ruban de verre, par pyrolyse d'un melange gazeux.
US5863337A (en) * 1993-02-16 1999-01-26 Ppg Industries, Inc. Apparatus for coating a moving glass substrate
US5599387A (en) * 1993-02-16 1997-02-04 Ppg Industries, Inc. Compounds and compositions for coating glass with silicon oxide
US5356718A (en) * 1993-02-16 1994-10-18 Ppg Industries, Inc. Coating apparatus, method of coating glass, compounds and compositions for coating glasss and coated glass substrates
US6164557A (en) * 1998-04-30 2000-12-26 Sioux Steam Cleaner Corporation Fluid temperature control for a heated fluid cleaner with multiple outlets
JP4800845B2 (ja) * 2006-05-30 2011-10-26 積水化学工業株式会社 プラズマ処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4100962A (en) * 1977-02-28 1978-07-18 James H. Housman Casting die
US4793282A (en) * 1987-05-18 1988-12-27 Libbey-Owens-Ford Co. Distributor beam for chemical vapor deposition on glass

Also Published As

Publication number Publication date
ES2015459A6 (es) 1990-08-16
EP0391996A4 (en) 1991-07-31
BR8907091A (pt) 1991-01-08
MX171806B (es) 1993-11-15
FI902414A0 (fi) 1990-05-15
WO1990002826A1 (en) 1990-03-22
AU4308489A (en) 1990-04-02
AU618412B2 (en) 1991-12-19
FI902414A7 (fi) 1990-05-15
KR900702073A (ko) 1990-12-05
TW239165B (enrdf_load_stackoverflow) 1995-01-21
JPH03501474A (ja) 1991-04-04
EP0391996A1 (en) 1990-10-17

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Legal Events

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MKLA Lapsed