EP0391996A4 - Temperature controlled distributor beam for chemical vapor deposition - Google Patents

Temperature controlled distributor beam for chemical vapor deposition

Info

Publication number
EP0391996A4
EP0391996A4 EP19890910701 EP89910701A EP0391996A4 EP 0391996 A4 EP0391996 A4 EP 0391996A4 EP 19890910701 EP19890910701 EP 19890910701 EP 89910701 A EP89910701 A EP 89910701A EP 0391996 A4 EP0391996 A4 EP 0391996A4
Authority
EP
European Patent Office
Prior art keywords
vapor deposition
chemical vapor
temperature controlled
controlled distributor
distributor beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP19890910701
Other versions
EP0391996A1 (en
Inventor
William M. Greenberg
Randall L. Bauman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington North America Inc
Original Assignee
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Co filed Critical Libbey Owens Ford Co
Publication of EP0391996A1 publication Critical patent/EP0391996A1/en
Publication of EP0391996A4 publication Critical patent/EP0391996A4/en
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
EP19890910701 1988-09-16 1989-09-12 Temperature controlled distributor beam for chemical vapor deposition Ceased EP0391996A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US245444 1981-03-19
US24544488A 1988-09-16 1988-09-16

Publications (2)

Publication Number Publication Date
EP0391996A1 EP0391996A1 (en) 1990-10-17
EP0391996A4 true EP0391996A4 (en) 1991-07-31

Family

ID=22926680

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19890910701 Ceased EP0391996A4 (en) 1988-09-16 1989-09-12 Temperature controlled distributor beam for chemical vapor deposition

Country Status (11)

Country Link
EP (1) EP0391996A4 (en)
JP (1) JPH03501474A (en)
KR (1) KR900702073A (en)
AU (1) AU618412B2 (en)
BR (1) BR8907091A (en)
CA (1) CA1332281C (en)
ES (1) ES2015459A6 (en)
FI (1) FI902414A0 (en)
MX (1) MX171806B (en)
TW (1) TW239165B (en)
WO (1) WO1990002826A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2672519B1 (en) * 1991-02-13 1995-04-28 Saint Gobain Vitrage Int NOZZLE WITH HEAVY DOWNSTREAM HEEL, FOR DEPOSITING A COATING LAYER ON A TAPE OF GLASS, BY PYROLYSIS OF A GASEOUS MIXTURE.
US5356718A (en) * 1993-02-16 1994-10-18 Ppg Industries, Inc. Coating apparatus, method of coating glass, compounds and compositions for coating glasss and coated glass substrates
US5599387A (en) * 1993-02-16 1997-02-04 Ppg Industries, Inc. Compounds and compositions for coating glass with silicon oxide
US5863337A (en) * 1993-02-16 1999-01-26 Ppg Industries, Inc. Apparatus for coating a moving glass substrate
US6164557A (en) * 1998-04-30 2000-12-26 Sioux Steam Cleaner Corporation Fluid temperature control for a heated fluid cleaner with multiple outlets
JP4800845B2 (en) * 2006-05-30 2011-10-26 積水化学工業株式会社 Plasma processing equipment

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4100962A (en) * 1977-02-28 1978-07-18 James H. Housman Casting die
US4793282A (en) * 1987-05-18 1988-12-27 Libbey-Owens-Ford Co. Distributor beam for chemical vapor deposition on glass

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9002826A1 *

Also Published As

Publication number Publication date
AU618412B2 (en) 1991-12-19
BR8907091A (en) 1991-01-08
MX171806B (en) 1993-11-15
JPH03501474A (en) 1991-04-04
FI902414A0 (en) 1990-05-15
KR900702073A (en) 1990-12-05
TW239165B (en) 1995-01-21
AU4308489A (en) 1990-04-02
ES2015459A6 (en) 1990-08-16
EP0391996A1 (en) 1990-10-17
CA1332281C (en) 1994-10-11
WO1990002826A1 (en) 1990-03-22

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Legal Events

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