GB2210387B - Chemical vapour deposition - Google Patents

Chemical vapour deposition

Info

Publication number
GB2210387B
GB2210387B GB8723009A GB8723009A GB2210387B GB 2210387 B GB2210387 B GB 2210387B GB 8723009 A GB8723009 A GB 8723009A GB 8723009 A GB8723009 A GB 8723009A GB 2210387 B GB2210387 B GB 2210387B
Authority
GB
United Kingdom
Prior art keywords
vapour deposition
chemical vapour
chemical
deposition
vapour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB8723009A
Other versions
GB8723009D0 (en
GB2210387A (en
Inventor
Anthony Lionel Pratt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rolls Royce PLC
Original Assignee
Rolls Royce PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rolls Royce PLC filed Critical Rolls Royce PLC
Priority to GB8723009A priority Critical patent/GB2210387B/en
Publication of GB8723009D0 publication Critical patent/GB8723009D0/en
Publication of GB2210387A publication Critical patent/GB2210387A/en
Application granted granted Critical
Publication of GB2210387B publication Critical patent/GB2210387B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/04—Diffusion into selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/06—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases
    • C23C10/08—Solid state diffusion of only metal elements or silicon into metallic material surfaces using gases only one element being diffused

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Powder Metallurgy (AREA)
GB8723009A 1987-09-30 1987-09-30 Chemical vapour deposition Expired - Fee Related GB2210387B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8723009A GB2210387B (en) 1987-09-30 1987-09-30 Chemical vapour deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8723009A GB2210387B (en) 1987-09-30 1987-09-30 Chemical vapour deposition

Publications (3)

Publication Number Publication Date
GB8723009D0 GB8723009D0 (en) 1987-11-04
GB2210387A GB2210387A (en) 1989-06-07
GB2210387B true GB2210387B (en) 1992-03-11

Family

ID=10624615

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8723009A Expired - Fee Related GB2210387B (en) 1987-09-30 1987-09-30 Chemical vapour deposition

Country Status (1)

Country Link
GB (1) GB2210387B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL98057A (en) * 1990-05-14 1994-11-28 United Technologies Corp Variable thickness coating for aircraft turbine blades
DE4344061C1 (en) * 1993-12-23 1995-03-30 Mtu Muenchen Gmbh Component with protection arrangement against aluminisation or chromisation during gas diffusion coating, and process for the production thereof
US5803971A (en) * 1997-01-13 1998-09-08 United Technologies Corporation Modular coating fixture
US6521294B2 (en) * 1999-08-11 2003-02-18 General Electric Co. Aluminiding of a metallic surface using an aluminum-modified maskant, and aluminum-modified maskant
US6296705B1 (en) * 1999-12-15 2001-10-02 United Technologies Corporation Masking fixture and method
US6419753B1 (en) * 2000-04-07 2002-07-16 General Electric Company Apparatus and method for masking multiple turbine components
EP1352988A1 (en) * 2002-04-10 2003-10-15 Siemens Aktiengesellschaft Method for coating an object
US7976940B2 (en) 2002-04-10 2011-07-12 Siemens Aktiengesellschaft Component, method for coating a component, and powder
EP1352989A1 (en) * 2002-04-10 2003-10-15 Siemens Aktiengesellschaft Object having a masking layer
DE10347363A1 (en) * 2003-10-11 2005-05-12 Mtu Aero Engines Gmbh Method for locally alitating, silicating or chromating metallic components
EP1772529A1 (en) 2005-10-07 2007-04-11 Siemens Aktiengesellschaft Dry chemical composition, use thereof to form a layer system and method for coating

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3785854A (en) * 1972-05-18 1974-01-15 Alloy Surfaces Co Inc Diffusion coating
GB1566806A (en) * 1975-09-19 1980-05-08 Alloy Surfaces Co Inc Masking during diffusion coating
US4208453A (en) * 1969-06-30 1980-06-17 Alloy Surfaces Company, Inc. Modified diffusion coating of the interior of a steam boiler tube
GB1586501A (en) * 1976-06-11 1981-03-18 Alloy Surfaces Co Inc Metal coating
US4617202A (en) * 1970-11-18 1986-10-14 Alloy Surfaces Company, Inc. Diffusion coating mixtures
EP0272631A2 (en) * 1986-12-23 1988-06-29 Mtu Motoren- Und Turbinen-Union MàœNchen Gmbh Process for coating turbine components, especially turbine blades
EP0272630A2 (en) * 1986-12-23 1988-06-29 Mtu Motoren- Und Turbinen-Union MàœNchen Gmbh Process for coating turbine components, especially turbine blades

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4208453A (en) * 1969-06-30 1980-06-17 Alloy Surfaces Company, Inc. Modified diffusion coating of the interior of a steam boiler tube
US4617202A (en) * 1970-11-18 1986-10-14 Alloy Surfaces Company, Inc. Diffusion coating mixtures
US3785854A (en) * 1972-05-18 1974-01-15 Alloy Surfaces Co Inc Diffusion coating
GB1566806A (en) * 1975-09-19 1980-05-08 Alloy Surfaces Co Inc Masking during diffusion coating
GB1586501A (en) * 1976-06-11 1981-03-18 Alloy Surfaces Co Inc Metal coating
EP0272631A2 (en) * 1986-12-23 1988-06-29 Mtu Motoren- Und Turbinen-Union MàœNchen Gmbh Process for coating turbine components, especially turbine blades
EP0272630A2 (en) * 1986-12-23 1988-06-29 Mtu Motoren- Und Turbinen-Union MàœNchen Gmbh Process for coating turbine components, especially turbine blades

Also Published As

Publication number Publication date
GB8723009D0 (en) 1987-11-04
GB2210387A (en) 1989-06-07

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19990930