GB2155958B - Chemical vapour deposition - Google Patents

Chemical vapour deposition

Info

Publication number
GB2155958B
GB2155958B GB08406692A GB8406692A GB2155958B GB 2155958 B GB2155958 B GB 2155958B GB 08406692 A GB08406692 A GB 08406692A GB 8406692 A GB8406692 A GB 8406692A GB 2155958 B GB2155958 B GB 2155958B
Authority
GB
United Kingdom
Prior art keywords
vapour deposition
chemical vapour
chemical
deposition
vapour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08406692A
Other versions
GB2155958A (en
GB8406692D0 (en
Inventor
Stephen Arthur Banyard
Stephen Hornblow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Priority to GB08406692A priority Critical patent/GB2155958B/en
Publication of GB8406692D0 publication Critical patent/GB8406692D0/en
Publication of GB2155958A publication Critical patent/GB2155958A/en
Application granted granted Critical
Publication of GB2155958B publication Critical patent/GB2155958B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
GB08406692A 1984-03-14 1984-03-14 Chemical vapour deposition Expired GB2155958B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08406692A GB2155958B (en) 1984-03-14 1984-03-14 Chemical vapour deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08406692A GB2155958B (en) 1984-03-14 1984-03-14 Chemical vapour deposition

Publications (3)

Publication Number Publication Date
GB8406692D0 GB8406692D0 (en) 1984-04-18
GB2155958A GB2155958A (en) 1985-10-02
GB2155958B true GB2155958B (en) 1987-06-03

Family

ID=10558089

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08406692A Expired GB2155958B (en) 1984-03-14 1984-03-14 Chemical vapour deposition

Country Status (1)

Country Link
GB (1) GB2155958B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109576644A (en) * 2018-12-14 2019-04-05 北京工业大学 A kind of method of prepares coating conductor high-tungsten alloy base band

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1671014A1 (en) * 1966-01-14 1971-08-26 Siemens Ag Method for producing a solder-free gas-tight connection
DE2642949C3 (en) * 1976-09-24 1980-11-20 Philips Patentverwaltung Gmbh, 2000 Hamburg Process for the production of internally coated glass tubes for drawing optical fibers

Also Published As

Publication number Publication date
GB2155958A (en) 1985-10-02
GB8406692D0 (en) 1984-04-18

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20000314