GB8705062D0 - Chemical vapour deposition - Google Patents

Chemical vapour deposition

Info

Publication number
GB8705062D0
GB8705062D0 GB878705062A GB8705062A GB8705062D0 GB 8705062 D0 GB8705062 D0 GB 8705062D0 GB 878705062 A GB878705062 A GB 878705062A GB 8705062 A GB8705062 A GB 8705062A GB 8705062 D0 GB8705062 D0 GB 8705062D0
Authority
GB
United Kingdom
Prior art keywords
vapour deposition
chemical vapour
chemical
deposition
vapour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB878705062A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unvala Ltd
Original Assignee
Unvala Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unvala Ltd filed Critical Unvala Ltd
Publication of GB8705062D0 publication Critical patent/GB8705062D0/en
Priority to EP87306126A priority Critical patent/EP0252755A1/en
Priority to US07/411,226 priority patent/US4993361A/en
Pending legal-status Critical Current

Links

GB878705062A 1986-07-11 1987-03-04 Chemical vapour deposition Pending GB8705062D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP87306126A EP0252755A1 (en) 1986-07-11 1987-07-10 Chemical vapour deposition
US07/411,226 US4993361A (en) 1986-07-11 1989-09-22 Chemical vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08616989A GB2192901A (en) 1986-07-11 1986-07-11 Chemical vapour deposition

Publications (1)

Publication Number Publication Date
GB8705062D0 true GB8705062D0 (en) 1987-04-08

Family

ID=10600932

Family Applications (2)

Application Number Title Priority Date Filing Date
GB08616989A Withdrawn GB2192901A (en) 1986-07-11 1986-07-11 Chemical vapour deposition
GB878705062A Pending GB8705062D0 (en) 1986-07-11 1987-03-04 Chemical vapour deposition

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB08616989A Withdrawn GB2192901A (en) 1986-07-11 1986-07-11 Chemical vapour deposition

Country Status (2)

Country Link
JP (1) JPS6367728A (en)
GB (2) GB2192901A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2767284B2 (en) * 1989-06-06 1998-06-18 日立電子エンジニアリング株式会社 Liquid semiconductor forming material vaporizer
JP3355449B2 (en) * 1994-09-14 2002-12-09 ローム株式会社 Organometallic chemical vapor deposition method and apparatus
GB2308132A (en) * 1995-12-14 1997-06-18 Imperial College Depositing films on a substrate using an electric field

Also Published As

Publication number Publication date
GB8616989D0 (en) 1986-08-20
GB2192901A (en) 1988-01-27
JPS6367728A (en) 1988-03-26

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