GB8705062D0 - Chemical vapour deposition - Google Patents
Chemical vapour depositionInfo
- Publication number
- GB8705062D0 GB8705062D0 GB878705062A GB8705062A GB8705062D0 GB 8705062 D0 GB8705062 D0 GB 8705062D0 GB 878705062 A GB878705062 A GB 878705062A GB 8705062 A GB8705062 A GB 8705062A GB 8705062 D0 GB8705062 D0 GB 8705062D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- vapour deposition
- chemical vapour
- chemical
- deposition
- vapour
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP87306126A EP0252755A1 (en) | 1986-07-11 | 1987-07-10 | Chemical vapour deposition |
US07/411,226 US4993361A (en) | 1986-07-11 | 1989-09-22 | Chemical vapor deposition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB08616989A GB2192901A (en) | 1986-07-11 | 1986-07-11 | Chemical vapour deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
GB8705062D0 true GB8705062D0 (en) | 1987-04-08 |
Family
ID=10600932
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08616989A Withdrawn GB2192901A (en) | 1986-07-11 | 1986-07-11 | Chemical vapour deposition |
GB878705062A Pending GB8705062D0 (en) | 1986-07-11 | 1987-03-04 | Chemical vapour deposition |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08616989A Withdrawn GB2192901A (en) | 1986-07-11 | 1986-07-11 | Chemical vapour deposition |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS6367728A (en) |
GB (2) | GB2192901A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2767284B2 (en) * | 1989-06-06 | 1998-06-18 | 日立電子エンジニアリング株式会社 | Liquid semiconductor forming material vaporizer |
JP3355449B2 (en) * | 1994-09-14 | 2002-12-09 | ローム株式会社 | Organometallic chemical vapor deposition method and apparatus |
GB2308132A (en) * | 1995-12-14 | 1997-06-18 | Imperial College | Depositing films on a substrate using an electric field |
-
1986
- 1986-07-11 GB GB08616989A patent/GB2192901A/en not_active Withdrawn
-
1987
- 1987-03-04 GB GB878705062A patent/GB8705062D0/en active Pending
- 1987-07-10 JP JP17136187A patent/JPS6367728A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
GB8616989D0 (en) | 1986-08-20 |
GB2192901A (en) | 1988-01-27 |
JPS6367728A (en) | 1988-03-26 |
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