FI902414A7 - Lämpötilaohjattu jakelupalkki kemiallista höyrykerrostusta varten - Google Patents

Lämpötilaohjattu jakelupalkki kemiallista höyrykerrostusta varten Download PDF

Info

Publication number
FI902414A7
FI902414A7 FI902414A FI902414A FI902414A7 FI 902414 A7 FI902414 A7 FI 902414A7 FI 902414 A FI902414 A FI 902414A FI 902414 A FI902414 A FI 902414A FI 902414 A7 FI902414 A7 FI 902414A7
Authority
FI
Finland
Prior art keywords
temperature
vapor deposition
chemical vapor
distribution beam
controlled distribution
Prior art date
Application number
FI902414A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI902414A0 (fi
Inventor
William M Greenberg
Randall L Bauman
Original Assignee
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Co filed Critical Libbey Owens Ford Co
Publication of FI902414A0 publication Critical patent/FI902414A0/fi
Publication of FI902414A7 publication Critical patent/FI902414A7/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)
FI902414A 1988-09-16 1989-09-12 Lämpötilaohjattu jakelupalkki kemiallista höyrykerrostusta varten FI902414A7 (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US24544488A 1988-09-16 1988-09-16
PCT/US1989/003939 WO1990002826A1 (en) 1988-09-16 1989-09-12 Temperature controlled distributor beam for chemical vapor deposition

Publications (2)

Publication Number Publication Date
FI902414A0 FI902414A0 (fi) 1990-05-15
FI902414A7 true FI902414A7 (fi) 1990-05-15

Family

ID=22926680

Family Applications (1)

Application Number Title Priority Date Filing Date
FI902414A FI902414A7 (fi) 1988-09-16 1989-09-12 Lämpötilaohjattu jakelupalkki kemiallista höyrykerrostusta varten

Country Status (11)

Country Link
EP (1) EP0391996A4 (enrdf_load_stackoverflow)
JP (1) JPH03501474A (enrdf_load_stackoverflow)
KR (1) KR900702073A (enrdf_load_stackoverflow)
AU (1) AU618412B2 (enrdf_load_stackoverflow)
BR (1) BR8907091A (enrdf_load_stackoverflow)
CA (1) CA1332281C (enrdf_load_stackoverflow)
ES (1) ES2015459A6 (enrdf_load_stackoverflow)
FI (1) FI902414A7 (enrdf_load_stackoverflow)
MX (1) MX171806B (enrdf_load_stackoverflow)
TW (1) TW239165B (enrdf_load_stackoverflow)
WO (1) WO1990002826A1 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2672519B1 (fr) * 1991-02-13 1995-04-28 Saint Gobain Vitrage Int Buse a talon aval sureleve, pour deposer une couche de revetement sur un ruban de verre, par pyrolyse d'un melange gazeux.
US5599387A (en) * 1993-02-16 1997-02-04 Ppg Industries, Inc. Compounds and compositions for coating glass with silicon oxide
US5356718A (en) * 1993-02-16 1994-10-18 Ppg Industries, Inc. Coating apparatus, method of coating glass, compounds and compositions for coating glasss and coated glass substrates
US5863337A (en) * 1993-02-16 1999-01-26 Ppg Industries, Inc. Apparatus for coating a moving glass substrate
US6164557A (en) * 1998-04-30 2000-12-26 Sioux Steam Cleaner Corporation Fluid temperature control for a heated fluid cleaner with multiple outlets
JP4800845B2 (ja) * 2006-05-30 2011-10-26 積水化学工業株式会社 プラズマ処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4100962A (en) * 1977-02-28 1978-07-18 James H. Housman Casting die
US4793282A (en) * 1987-05-18 1988-12-27 Libbey-Owens-Ford Co. Distributor beam for chemical vapor deposition on glass

Also Published As

Publication number Publication date
FI902414A0 (fi) 1990-05-15
TW239165B (enrdf_load_stackoverflow) 1995-01-21
JPH03501474A (ja) 1991-04-04
AU618412B2 (en) 1991-12-19
BR8907091A (pt) 1991-01-08
MX171806B (es) 1993-11-15
WO1990002826A1 (en) 1990-03-22
ES2015459A6 (es) 1990-08-16
EP0391996A1 (en) 1990-10-17
EP0391996A4 (en) 1991-07-31
CA1332281C (en) 1994-10-11
AU4308489A (en) 1990-04-02
KR900702073A (ko) 1990-12-05

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Legal Events

Date Code Title Description
FD Application lapsed
FD Application lapsed

Owner name: LIBBEY-OWENS FORD CO.