AU618412B2 - Temperature controlled distributor beam for chemical vapor deposition - Google Patents
Temperature controlled distributor beam for chemical vapor deposition Download PDFInfo
- Publication number
- AU618412B2 AU618412B2 AU43084/89A AU4308489A AU618412B2 AU 618412 B2 AU618412 B2 AU 618412B2 AU 43084/89 A AU43084/89 A AU 43084/89A AU 4308489 A AU4308489 A AU 4308489A AU 618412 B2 AU618412 B2 AU 618412B2
- Authority
- AU
- Australia
- Prior art keywords
- blocks
- support
- plenums
- insulating material
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000005229 chemical vapour deposition Methods 0.000 title description 5
- 239000011810 insulating material Substances 0.000 claims description 54
- 239000007789 gas Substances 0.000 claims description 50
- 238000000576 coating method Methods 0.000 claims description 40
- 239000011248 coating agent Substances 0.000 claims description 39
- 239000011521 glass Substances 0.000 claims description 39
- 238000002156 mixing Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 22
- 239000012809 cooling fluid Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 2
- 230000006835 compression Effects 0.000 claims 2
- 238000007906 compression Methods 0.000 claims 2
- 238000005485 electric heating Methods 0.000 claims 2
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000003643 water by type Substances 0.000 claims 1
- 235000012773 waffles Nutrition 0.000 description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 16
- 239000006060 molten glass Substances 0.000 description 13
- 125000006850 spacer group Chemical group 0.000 description 11
- 235000000396 iron Nutrition 0.000 description 10
- 238000000605 extraction Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- 239000013529 heat transfer fluid Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000000717 retained effect Effects 0.000 description 5
- 238000003466 welding Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 230000000284 resting effect Effects 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 239000005329 float glass Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 240000006766 Cornus mas Species 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Surface Treatment Of Glass (AREA)
- Chemical Vapour Deposition (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Glass Melting And Manufacturing (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US24544488A | 1988-09-16 | 1988-09-16 | |
| US245444 | 1988-09-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU4308489A AU4308489A (en) | 1990-04-02 |
| AU618412B2 true AU618412B2 (en) | 1991-12-19 |
Family
ID=22926680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU43084/89A Ceased AU618412B2 (en) | 1988-09-16 | 1989-09-12 | Temperature controlled distributor beam for chemical vapor deposition |
Country Status (11)
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2672519B1 (fr) * | 1991-02-13 | 1995-04-28 | Saint Gobain Vitrage Int | Buse a talon aval sureleve, pour deposer une couche de revetement sur un ruban de verre, par pyrolyse d'un melange gazeux. |
| US5863337A (en) * | 1993-02-16 | 1999-01-26 | Ppg Industries, Inc. | Apparatus for coating a moving glass substrate |
| US5599387A (en) * | 1993-02-16 | 1997-02-04 | Ppg Industries, Inc. | Compounds and compositions for coating glass with silicon oxide |
| US5356718A (en) * | 1993-02-16 | 1994-10-18 | Ppg Industries, Inc. | Coating apparatus, method of coating glass, compounds and compositions for coating glasss and coated glass substrates |
| US6164557A (en) * | 1998-04-30 | 2000-12-26 | Sioux Steam Cleaner Corporation | Fluid temperature control for a heated fluid cleaner with multiple outlets |
| JP4800845B2 (ja) * | 2006-05-30 | 2011-10-26 | 積水化学工業株式会社 | プラズマ処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU601594B2 (en) * | 1987-05-18 | 1990-09-13 | Libbey-Owens-Ford Co. | Distributor beam for chemical vapor deposition on glass |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4100962A (en) * | 1977-02-28 | 1978-07-18 | James H. Housman | Casting die |
-
1989
- 1989-09-06 CA CA000610445A patent/CA1332281C/en not_active Expired - Fee Related
- 1989-09-12 BR BR898907091A patent/BR8907091A/pt unknown
- 1989-09-12 WO PCT/US1989/003939 patent/WO1990002826A1/en not_active Application Discontinuation
- 1989-09-12 EP EP19890910701 patent/EP0391996A4/en not_active Ceased
- 1989-09-12 JP JP1510126A patent/JPH03501474A/ja active Pending
- 1989-09-12 AU AU43084/89A patent/AU618412B2/en not_active Ceased
- 1989-09-12 FI FI902414A patent/FI902414A7/fi not_active Application Discontinuation
- 1989-09-12 KR KR1019900701014A patent/KR900702073A/ko not_active Withdrawn
- 1989-09-13 TW TW078107044A patent/TW239165B/zh active
- 1989-09-14 MX MX017556A patent/MX171806B/es unknown
- 1989-09-15 ES ES898903138A patent/ES2015459A6/es not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU601594B2 (en) * | 1987-05-18 | 1990-09-13 | Libbey-Owens-Ford Co. | Distributor beam for chemical vapor deposition on glass |
Also Published As
| Publication number | Publication date |
|---|---|
| ES2015459A6 (es) | 1990-08-16 |
| EP0391996A4 (en) | 1991-07-31 |
| BR8907091A (pt) | 1991-01-08 |
| MX171806B (es) | 1993-11-15 |
| FI902414A0 (fi) | 1990-05-15 |
| WO1990002826A1 (en) | 1990-03-22 |
| AU4308489A (en) | 1990-04-02 |
| FI902414A7 (fi) | 1990-05-15 |
| KR900702073A (ko) | 1990-12-05 |
| CA1332281C (en) | 1994-10-11 |
| TW239165B (enrdf_load_stackoverflow) | 1995-01-21 |
| JPH03501474A (ja) | 1991-04-04 |
| EP0391996A1 (en) | 1990-10-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1293119C (en) | Distributor beam for chemical vapor deposition on glass | |
| US4469045A (en) | Coating glass | |
| US5065696A (en) | Temperature controlled distributor beam for chemical vapor deposition | |
| JP2518896B2 (ja) | 板ガラスのコ―ティング方法および装置 | |
| AU618412B2 (en) | Temperature controlled distributor beam for chemical vapor deposition | |
| EP0193419A1 (en) | Method and apparatus for low pressure chemical vapor deposition | |
| JP2594650B2 (ja) | ガラス被覆方法および装置 | |
| JP2017040004A (ja) | 薄膜コーティングを被覆するための装置およびこのような装置を用いた被覆方法 | |
| US4081260A (en) | Process for making sheet glass on a fluid support | |
| US3976460A (en) | Method and apparatus for introducing a protective atmosphere into a glass forming chamber | |
| US4511385A (en) | Forehearth for molten glass and method of using same | |
| CA1054370A (en) | Method and apparatus for manufacture of flat glass by the float process | |
| US6103015A (en) | Symmetrical CVD coater with lower upstream exhaust toe | |
| EP0143427B1 (en) | Method and aparatus for controlling an ablation liquefaction process | |
| EP0301067B1 (en) | Apparatus for coating glass | |
| US5728916A (en) | Thermal cracking | |
| JPH0246533B2 (enrdf_load_stackoverflow) | ||
| EP0083383A1 (en) | Process and apparatus for forming thin films on a moving substrate | |
| SU283079A1 (ru) | Ванна к установке для изготовления листового стекла | |
| CA1054371A (en) | Apparatus for manufacture of flat glass by the float process | |
| IL25141A (en) | Manufacture of flat glass |