JPH0347999B2 - - Google Patents

Info

Publication number
JPH0347999B2
JPH0347999B2 JP2120885A JP2120885A JPH0347999B2 JP H0347999 B2 JPH0347999 B2 JP H0347999B2 JP 2120885 A JP2120885 A JP 2120885A JP 2120885 A JP2120885 A JP 2120885A JP H0347999 B2 JPH0347999 B2 JP H0347999B2
Authority
JP
Japan
Prior art keywords
robot
air
dust
internal
negative pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2120885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61182791A (ja
Inventor
Haruo Tada
Takanori Funahashi
Akira Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2120885A priority Critical patent/JPS61182791A/ja
Publication of JPS61182791A publication Critical patent/JPS61182791A/ja
Publication of JPH0347999B2 publication Critical patent/JPH0347999B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP2120885A 1985-02-06 1985-02-06 工業用ロボツト Granted JPS61182791A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2120885A JPS61182791A (ja) 1985-02-06 1985-02-06 工業用ロボツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2120885A JPS61182791A (ja) 1985-02-06 1985-02-06 工業用ロボツト

Publications (2)

Publication Number Publication Date
JPS61182791A JPS61182791A (ja) 1986-08-15
JPH0347999B2 true JPH0347999B2 (enrdf_load_stackoverflow) 1991-07-23

Family

ID=12048570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2120885A Granted JPS61182791A (ja) 1985-02-06 1985-02-06 工業用ロボツト

Country Status (1)

Country Link
JP (1) JPS61182791A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5101746A (en) * 1987-06-30 1992-04-07 Mim Industries, Inc. Work holder for sewing machines
JP5715198B2 (ja) * 2013-07-05 2015-05-07 ファナック株式会社 ロボット用駆動ケーブルの処理構造体及びそれを具備するロボット装置

Also Published As

Publication number Publication date
JPS61182791A (ja) 1986-08-15

Similar Documents

Publication Publication Date Title
JPH0310478B2 (enrdf_load_stackoverflow)
EP0169905B1 (en) Industrial robot
JPH02113176A (ja) 液体及び／又は気体の媒質によって種々の圧力で加圧される空間を密封するための，特にターボ機械用の装置
US4972731A (en) Robot for clean room use having contaminant particle-removal system incorporated therein
JPH0347999B2 (enrdf_load_stackoverflow)
WO1988000515A1 (en) Wrist mechanism of a robot used in a clean air atmosphere
KR900003642B1 (ko) 방진 구조물을 구비한 산업용 로보트
JP6451906B2 (ja) モータ、アクチュエータ、半導体製造装置、及びフラットディスプレイ製造装置
JP2006066457A (ja) ステージ駆動装置
JPH0929682A (ja) クリーン環境用機器のシール装置及びクリーンロボット
JP2001140882A (ja) 静圧気体軸受装置
JPH0755465B2 (ja) 工業用ロボツト
JPS6133889A (ja) 工業用ロボツト
JP2001200844A (ja) 静圧気体軸受スピンドル
JP2004019760A (ja) 静圧軸受
JPH02205493A (ja) ロボット関節部の防塵構造
JP2576268B2 (ja) ロボットの関節機構
SU1657371A1 (ru) Модуль промышленного робота
JPH035439Y2 (enrdf_load_stackoverflow)
JP2005249079A (ja) シールユニット
JPS6133888A (ja) 工業用ロボツト
JPS61117094A (ja) 工業用ロボツト
JPH06159366A (ja) 静圧気体軸受
JPS61182789A (ja) 産業用ロボツトの手首
JP2997397B2 (ja) ロボットのシール構造及びこれを用いた直動型ロボット