JPH0346573A - Inspecting device - Google Patents

Abstract

PURPOSE:To improve the reliability by checking whether an object to be measured exists or not in advance by a sensor provided on a detection electrode and executing an inspection of an electric characteristic. CONSTITUTION:On the surface and reverse sides of a terminal 4, a detection electrode 1a is placed opposingly through a void, and the electrode 1a becomes one body with a claw member 1 and provided on its tip. On this claw member 1, an optical fiber 5 is provided, one end of the optical fiber 5 faces the front of the electrode 1a, and the other end is connected to a pH sensor 6. In this state, by a transmission type sensor formed by the optical fiber 5 and the sensor 6, whether a terminal 4 exists or not is detected. Subsequently, the claw member 1 is connected to a characteristic inspecting part 2 through a cable, etc., and movable by a driving part 7, and by bringing the electrode 1a into contact with the terminal 4 of a conductive body of an object 3 to be measured, a detecting signal in this case is inputted to the inspecting part 2, and an electric characteristic inspection is automatically executed.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an inspection device for detecting the electrical characteristics of an object to be measured having a terminal of a conductor such as a semiconductor or a relay.

(Prior Art) As an inspection device that detects the electrical characteristics of a test object by bringing a detection electrode into contact with the terminal of the test object, there is a test device that clamps the terminal of the test object and is disclosed in, for example, Japanese Utility Model Application No. 157677/1983 ( (hereinafter referred to as "former prior art") Publication, Utility Model Application No. 63-17
This is proposed in Publication No. 7769 (hereinafter referred to as "the latter prior art").

That is, the former conventional technology detects defects by contacting a detection electrode made of carbon felt around a continuously running insulated wire, and the latter conventional technology detects defects from both the front and back sides of IC leads. At the same time, ICs are sorted by bringing detection pins into contact and performing electrical measurements.

(Problem to be Solved by the Invention) However, according to the conventional inspection devices described above, the electrical characteristics of the object to be measured are detected without confirming the presence or absence of the terminals, so there is a risk of bending or bending of the terminals. When missing,
There is a possibility that electrical characteristics may be detected even though the detection electrode is not in contact with the terminal, and in this case, there is a problem that an erroneous detection result is output, resulting in a decrease in detection reliability.

This invention was made to solve such problems, and its purpose is to non-contactly detect the presence or absence of an object to be measured prior to inspection, and to inspect the electrical characteristics after this detection. Accordingly, it is an object of the present invention to provide an inspection device that can improve reliability and shorten inspection time.

(Means for Solving the Problems) In order to achieve the above object, the present invention provides an inspection device that detects the electrical characteristics of a conductive object by bringing a detection electrode into contact with the object. Detection electrodes are arranged opposite to each other with a gap between them on both sides, a sensor is provided on the detection electrodes and detects the presence or absence of an object to be measured in a non-contact manner, and the detection electrodes are moved based on signals from the sensors. and a drive unit that brings the device into contact with the object to be measured.

(Function) According to the present invention, with the above configuration, the presence or absence of the object to be measured is checked in advance by a sensor provided on the detection electrode before testing the electrical characteristics. The reliability of the detection results is improved because there is no fear that the test will be performed even if there is no detection result and that an erroneous detection result will be produced.

In addition, the detection of the presence or absence of the object to be measured at this time is not performed by mechanically clamping the object to be measured, but is performed using the sensor in a non-contact state between the detection electrode and the object to be measured. This has the advantage of saving time.

(Example) Hereinafter, preferred examples of the present invention will be described based on the drawings.

FIG. 1 schematically shows area II of the inspection apparatus according to the present invention.

In the figure, the inspection apparatus of this embodiment is equipped with a detection electrode la and a characteristic inspection section 2, and by bringing the detection electrode 1a into contact with a terminal 4 of a conductor of an object to be measured 3, a detection signal at this time is generated. is taken into the characteristic testing section 2, and predetermined electrical characteristics, measurements, and inspections are automatically performed.

Here, the characteristic feature of the present invention is that the detection electrode 1a is disposed facing each other on both the front and back sides of the object to be measured 3 with a gap therebetween, and the detection electrode 1a provided on the detection electrode 1a is
The sensor includes a sensor that detects the presence or absence of the object in a non-contact manner, and a drive section that moves the detection electrode 1a and brings it into contact with the object to be measured 3 based on a signal from the sensor.

That is, in this embodiment, detection electrodes 1a and 1a are arranged facing each other on both the front and back sides of the terminal 4 with a gap in between, and these detection electrodes 1a and 1a are connected to the claw member 1.
It is integrated with and installed at its tip. An optical fiber 5 is provided on the detection electrodes 1a, la, that is, the claw member 1, and one end of this optical fiber 5 is connected to the detection electrode 1.
The other end is connected to all PH sensors. These pairs of optical fibers 5.5 are arranged opposite to each other with a gap in between, similar to the detection electrodes 1a and la, and a transmission type sensor formed by the optical fibers 5, 5 and a PH sensor is used. The presence or absence of the terminal 4 is detected. The detection electrode 1a, that is, the claw member 1, is connected to the characteristic testing section 2 via a cable or the like, and is movable by a drive section 7. The movement is controlled so that it can move toward and away from the target.

FIG. 2 shows an enlarged view of the main part of this embodiment, and as is clear from the drawing, the claw members 1 are disposed facing each of a plurality of terminals 4 on the object to be measured 3. Each PH sensor is connected to each claw member 1.1 via an optical fiber 5.5.

Next, the operation of this embodiment will be explained based on the control flowchart shown in FIG. 3. Here, an example will be explained in which the electrical characteristics of the object to be measured are automatically measured by a computer.

First, in step 10, type information of the object to be measured 3 is input to the computer using a barcode league, an image recognition device, an ID card, or the like.

In step 12, the input type information is checked, and if it is normal, the process proceeds to step 14, and if it is abnormal, the process proceeds to step 30, where abnormality processing is performed. In step 14,
Detection electrode (measurement electrode) l according to the type information of the object to be measured 3
a, that is, the claw member 1 is determined.

In step 16, the PH
The presence or absence of the terminal 4 of the object to be measured 3 is detected by the sensor 6, and the detection signal is manually input to the computer.

At this time, in a stationary state in which the object to be measured 3 is not set, the claw members 1.1 disposed opposite to each other are in an open state, and the optical fibers 5, 5 also allow light to pass from one side to the other through the gap. It has been input and is in a conductive state.

When the object to be measured 3 is set, the optical path in the gap is blocked by the terminal 4, so the optical fiber 5.5 becomes non-conductive, and the PH sensor 6 detects the presence or absence of the terminal 4 between the detection electrodes 1a and 1a. Detected.

In step 18, it is detected whether all the terminals 4 of the object to be measured 3 are present based on the type information inputted above, and if YES, the process proceeds to step 20, and if NO, the process proceeds to step 30. Proceed to take corrective action such as displaying an abnormality or discarding the product as defective. Furthermore, in the case of No, the process returns to step 10 and retry 7 is performed as necessary. In step 20, the claw member 1 is
That is, the detection electrode 1a is assigned to the device, and in step 22, a control signal is sent from the PI (sensor 6 to the drive unit 7) to move the claw members 1, 1 in the direction of closing,
The detection electrode 1a is brought into contact with the terminal 4.

Further, in step 24, the electrical characteristics of the object to be measured 3 are measured in the characteristic testing section 2, and when the test is completed, in step 26, the claw member 1.1 is moved in the direction of opening, and the terminal 4 and the detection electrode 1a and into a non-contact state. Subsequently, in step 28, the assignment of the detection electrode 1a, that is, the claw member 1, to the device is canceled.

As explained above, conventionally, when performing a non-continuity test (withstanding voltage test) between two terminals of a device to be measured, for example, even if the terminals of the device to be measured are not in contact with the detection electrode due to terminal failure, etc. However, according to this embodiment, the presence or absence of terminals on the object to be measured is checked in advance, so in such a case, the product may be on the safe side (defective). Since the determination can be made based on the following information, reliability is improved.

In addition, since the presence or absence of the terminal 4 of the object to be measured 3 can be checked while the claw member 1 remains in a steady state (open state), there is no need for lamp operation, which is required when testing the presence or absence of a terminal using the conventional continuity method. This can significantly reduce inspection time.

Furthermore, in this embodiment, since the presence or absence of the terminal 4 is detected using the optical fiber 5, which is an insulator, the characteristic testing section 2
There is no need to selectively switch between

Furthermore, the completion of positioning of the object to be measured 3 can be recognized by the presence/absence pattern of the terminals 4, and the product type can be automatically identified based on this presence/absence pattern.
Automatic switching of tests can also be performed by assigning test signals to each detection electrode 1a.

(Effects of the Invention) As explained above, the present invention provides an inspection device that detects the electrical characteristics of a conductive object by bringing a detection electrode into contact with the object. Detection electrodes arranged opposite to each other, a sensor provided on the detection electrodes to non-contact detect the presence or absence of an object to be measured, and based on a signal from the sensor, the detection electrodes are moved and brought into contact with the object to be measured. By including the drive unit, the electrical characteristics can be tested after confirming the presence or absence of the terminal of the object to be measured in advance of the test, thereby improving the reliability of the detection results. In addition, since the presence or absence of the terminal can be detected with the detection electrode in an open state (non-contact),
Inspection time can be significantly reduced.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a schematic configuration of an inspection apparatus according to the present invention, FIG. 2 is an enlarged view of the main part thereof, and FIG. 3 is a diagram showing a control flowchart according to the present embodiment. 1... Claw member la... Detection electrode 2... Characteristic inspection section 3... Measured object 4... Terminal 5... Optical fiber 6 - PH all sensor - Drive section 2 Fig. of

Claims (1)

[Scope of Claims] An inspection device that detects the electrical characteristics of a conductive object by bringing the detection electrode into contact with the object, comprising: detection electrodes disposed opposite to each other on both the front and back sides of the object to be measured with a gap in between; The detection electrode includes a sensor that detects the presence or absence of the object to be measured in a non-contact manner, and a drive unit that moves the detection electrode to contact the object to be measured based on a signal from the sensor. An inspection device featuring: