JPH1090359A - Waveform probe apparatus and inspection method using it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a waveform probe apparatus by which the contact of a probe with a specimen is confirmed and by which the inspection part of the specimen can be grasped precisely and simply in the waveform probe apparatus which is of high pin counts and in which the distance between pins is made fine and to provide an inspection method using the apparatus. SOLUTION: A waveform probe apparatus is provided with an electronic- characteristic-change voltage power supply 2 which is connected to a probe 3 and which generates the electric characteristic change of a specimen separately from a signal detector 1 which is connected to the probe 3 which is used to investigate the circuit state of the specimen. When an electric-characteristic change voltage is applied, the inspection part of the specimen coming into contact with the probe 3 is specified by tracking the electric characteristic change generated in the specimen. In a liquid-crystal panel as the specimen coming into contact with the probe 3, a voltage is applied to a liquid-crystal cell via the connector of a driving electrode, and the display characteristic of the liquid-crystal cell is changed. When its change is confirmed visually or the like, the contact of the probe 3 with the liquid-crystal panel is confirmed, and the inspection part of the liquid-crystal panel is specified.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a waveform probe device for inspecting a sample based on an electric signal obtained by bringing a probe into contact with the sample, and an inspection method using the same.

[0002]

2. Description of the Related Art At present, a waveform probe device is widely used for checking a circuit of a DRAM wafer and a circuit of a liquid crystal substrate. FIG. 4 shows a conventional waveform probe device.
In FIG. 4, reference numeral 8 denotes a signal detection device such as a tester or an oscilloscope, 9 denotes a probe, and 10 denotes a specimen. Inspection using a conventional waveform probe device basically involves bringing the probe 9 into contact with a terminal or a wiring of the sample 10, connecting the probe 9 to the signal detection device 8 via the probe 9, The continuity check of the circuit and the functional characteristics of the active element were checked.

[0003] In this waveform probe device, while the distance between terminals of circuit elements and wirings to be inspected becomes fine due to the recent improvement in high-density mounting technology, inspection is performed at once due to a demand for shortening the inspection process time. In order to increase the number of parts, the number of pins of the probe of the waveform probe device has been increased and the distance between pins has been reduced. The number of pins and the distance between the probes have been reduced in both the needle probe and the membrane probe of the conventional waveform probe device.

[0004]

As described above, the number of pins of the probe of the waveform probe device has been increased, the distance between the pins has been reduced, and the size of the sample circuit element / wiring has been reduced. For example, column electrodes of a liquid crystal display panel have been developed. The wiring terminal pitch of the row electrodes has been reduced to several tens of microns or less. In the actual inspection process under such circumstances, the probe 9 and the sample 1 of the waveform probe device are used.
Confirmation of contact with the circuit of No. 0 is a problem. If good contact with the circuit of the specimen 10 is not guaranteed for all of the probes 9 of the waveform probe device, whether or not a waveform defect is detected may be due to a defective circuit conduction state. It cannot be guaranteed that the determination is due to poor contact between the sample and the circuit of the sample 10. In addition, unless the probe 9 of the waveform probe device comes into contact and the test site of the sample 10 to be tested is accurately and simply determined, the test accuracy and quality cannot be guaranteed, and the test process time cannot be shortened. Conventionally, an appropriate load is applied to the probe 9 and the probe 9 is pressed to scratch the surface of the sample 10 to make contact.

SUMMARY OF THE INVENTION An object of the present invention is to provide a waveform probe device and a test method therefor, which allow the probe of the waveform probe device to reliably contact and accurately and easily grasp the site of the sample under test.

[0006]

In order to achieve the above object, a waveform probe apparatus according to the present invention is connected to the probe separately from detection means used for examining a circuit state of the specimen, and is provided with a probe. Electrical characteristic change voltage applying means for causing a change in the electrical characteristics.

[0007] The inspection method using the waveform probe device according to the present invention is characterized in that, in the inspection for examining the circuit state of the specimen by detecting the amount of electrical change occurring between the probe and the specimen, A voltage is applied to the sample in contact with the probe by the changing voltage applying means to cause a change in electrical characteristics, and the contact between the probe and the sample is confirmed using the change in the electrical characteristics as a clue. Identify the test site of the sample that the probe is in contact with.

Further, in the inspection method using the waveform probe device according to the present invention, when the specimen is a liquid crystal display panel, a change in display of a liquid crystal cell caused by the electric characteristic change voltage is used as a clue. Checking the contact between the probe of the waveform probe and the liquid crystal display panel and specifying the inspection site of the liquid crystal panel with which the probe contacts.

With this configuration and the inspection method, it is possible to cause a change in the electrical characteristics of the inspection part of the specimen with which the probe is in contact. For example, in the case of a liquid crystal display panel, the display of liquid crystal by applying a voltage to a liquid crystal cell Characteristics change. By using this characteristic change as a clue, it is possible to accurately and simply grasp the test site of the sample under test and the contact state thereof.

[0010]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a configuration diagram of a waveform probe device according to a first embodiment of the present invention. 1 is a waveform signal measuring device such as an oscilloscope, 2 is an electric characteristic change voltage power supply for applying a voltage for giving an electric characteristic change to a specimen, 3 is a probe, 4 is a changeover switch, and The device to be connected is switched to either the waveform signal measuring device 1 or the voltage power supply 2 for changing electrical characteristics. In FIG. 1, the probe 3
Although only one is illustrated, a plurality of pins may be provided, and when there are a plurality of pins, the pins may be freely arranged in accordance with the shape of the specimen and the inspection location to be performed at one time, such as one horizontal row. Further, in addition to the above two states, the connection state of the probe 3 by the changeover switch 4 may be switched to a cutoff state in which nothing is connected.

FIG. 2 is a diagram illustrating a state in which the liquid crystal display panel 5, which is a sample according to the first embodiment of the present invention, and the probe 3 of the probe device are in contact with each other. Reference numeral 6 denotes a connector for a drive electrode of the liquid crystal display panel 5, and reference numeral 7 denotes a liquid crystal cell formed in the liquid crystal panel. The shape of the connector 6 of the drive electrode of the liquid crystal display panel, the probe 3
Is not limited to the shape shown in FIG.

As described above, the contact between the connector 6 of the drive electrode of the liquid crystal display panel 5 and the probe 3 is made. At this stage, it is determined whether or not the two are completely contacted. Not yet guaranteed.

Next, FIG. 3 shows a flowchart of an inspection method using the waveform probe device according to the present invention.

First, in step 31, as shown in FIG. 2, the probe 3 is brought into contact with the position of the connector 6 of the drive electrode of the liquid crystal display panel 5 to be inspected. At this time, if there are multiple locations to be inspected simultaneously for the purpose of shortening the inspection process,
A plurality of the probes 3 are arranged in accordance with each position,
The contact of the drive electrode of the liquid crystal display panel 5 to be inspected with the connector 6 is similarly attempted. At this stage, as described in the description with reference to FIG. 2, it is not yet guaranteed whether or not the two are completely contacted.

Next, in step 32, the changeover switch 4 is switched to connect the probe 3 to the electric characteristic changing voltage power supply 2. As a result, a voltage for causing a change in the electrical characteristics is applied to the connector 6 of the driving electrode of the liquid crystal display panel 5 that is in contact therewith via the probe 3.

Next, in step 33, step 2
Is applied to the liquid crystal cell 7 connected via the connector 6 of the drive electrode.
Is applied to Assuming that the voltage applied here is a voltage that causes a change in the electrical characteristics of the liquid crystal cell 7, that is, a voltage that causes the polarization phenomenon of the encapsulated liquid crystal, a visual change such as inversion of the display of the liquid crystal cell 7 occurs.

Next, in step 34, a change in the display state of the liquid crystal cell 7 is visually confirmed. This allows
If there is a row where the display is missing, it can be determined that the probe 3 is in poor contact with the connector 6 of the drive electrode of the liquid crystal display panel 5. By this method, contact between all the connectors 6 to be measured and the probe 3 is confirmed.

The means for confirming the change in the display state of the liquid crystal cell 7 is not limited to the means for visual confirmation, but may be a means for pattern-recognizing an image captured by the imaging means.

Next, in step 35, normal inspection using a probe device, such as switching inspection of the elements in the liquid crystal display panel 5, is continuously performed.

According to the above-described test procedure, good contact with the specimen is assured during the test using the probe device.

[0022]

As described above, according to the waveform probe device and the inspection method using the waveform probe device of the present invention,
It is possible to accurately and simply grasp the test site of the sample under test and the contact state thereof, to assure test accuracy and quality, and to shorten the test process time.

[Brief description of the drawings]

FIG. 1 is a system configuration diagram of a waveform probe device according to a first embodiment of the present invention.

FIG. 2 is a diagram illustrating a state of contact between a probe 3 of a waveform probe device according to a first embodiment of the present invention and a connector 6 of a drive electrode of a liquid crystal display panel 5 as a sample.

FIG. 3 is a flowchart showing a procedure of an inspection method using the waveform probe device according to the first embodiment of the present invention.

FIG. 4 is a system configuration diagram of a waveform probe device in a conventional embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Signal detector 2 Electric property change voltage power supply 3 Probe 4 Changeover switch 5 Liquid crystal display panel 6 Connector 7 Liquid crystal cell 8 Signal detector 9 Probe 10 Sample

Claims (3)

[Claims] 1. A probe connected to a probe, and signal detection for detecting an amount of electrical change generated between the substance and the probe when the probe is scanned while being brought into contact with the surface of a sample. In a waveform probe device provided with a device, apart from detection means used for examining a circuit state of the specimen, an electric property change voltage applying means connected to the probe and causing a change in electric properties of the specimen A waveform probe device comprising: 2. An inspection method using the waveform probe device according to claim 1, wherein an inspection is performed to detect a circuit state of the specimen by detecting an amount of electrical change generated between the probe and the specimen. At this time, a voltage is applied to the specimen that the probe is in contact with by the electric characteristic change voltage applying means,
An inspection method for causing a change in electrical characteristics, checking the contact between the probe and the sample based on the change in the electrical characteristics, and specifying an inspection site of the sample in contact with the probe. 3. The method according to claim 1, wherein the sample is a liquid crystal display panel, and a change in display of a liquid crystal cell caused by the electric characteristic change voltage is used as a clue, so that a contact between the probe of the waveform probe and the liquid crystal display panel is obtained. The inspection method using the waveform probe device according to claim 2, further comprising confirming and specifying an inspection site of the liquid crystal panel with which the probe contacts.