JP3177330B2 - Inspection device and inspection method for active matrix display device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus for inspecting an active matrix display device such as a liquid crystal display.

[0002]

2. Description of the Related Art In an active matrix display device, electrical characteristics and a display state are inspected at the final stage of the manufacturing process. First, at the final stage of the manufacturing process of the active matrix substrate, an inspection of electrical characteristics is performed. In the inspection of the electrical characteristics, a conductive contact member such as a probe card or a flexible printed board is brought into contact with wiring such as a gate bus line (scanning line), a source bus line (signal line) and a counter electrode formed on the active matrix substrate. Then, the electric resistance is measured by applying a voltage to these wirings. This makes it possible to inspect the characteristics of each switching element, the resistance and disconnection of each wiring such as the gate bus line and the source bus line, and the short circuit between the wirings. When a defect is found by the inspection of the electrical characteristics, if the defective portion can be repaired, the short-circuited portion is cut by irradiation of light energy such as a laser, or the broken portion is connected to be repaired. The repaired active matrix substrate is inspected again for electrical characteristics, and if no defect is found, it becomes a non-defective product.

An active matrix substrate determined to be non-defective by inspection of electrical characteristics is sent to the next step. In this step, the active matrix substrate is bonded to the counter electrode substrate, and a display medium such as a liquid crystal is sealed to complete an active matrix display device. With respect to the completed active matrix display device, a display state inspection is performed to detect a defect such as a picture element defect. In the display state inspection, if the active matrix display device has a drive circuit, the drive circuit is used. If the drive circuit is not provided, a probe card or the like is connected to each input terminal of the active matrix display device. By contacting the conductive contact member, a driving signal for inspection is sent from an external driving circuit to a gate bus line, a source bus line, a counter electrode, and the like, and the display state at this time is visually observed and image processing of a video imaged by a camera is performed. It is to be inspected. Even when a defect is found by inspection of the display state, if the defective portion can be repaired, the corresponding portion of the active matrix substrate is repaired by laser irradiation or the like.

[0004]

However, when a defect is repaired in the state of the completed active matrix display device, it is necessary to inspect the display state again. Also,
In the state of the active matrix display device, the inspection of the electrical characteristics must be performed again. However, conventionally, the inspection of the display state and the inspection of the electrical characteristics have to be performed by separate inspection devices.

[0005] For this reason, in the conventional inspection apparatus, it is necessary to set an active matrix display device in each inspection apparatus when inspecting the electrical characteristics and inspecting the display state. There is a problem that it takes time and effort to perform positioning and the like at the time of this setting, and furthermore, there is a waste that a conductive contact member such as a probe card of each inspection device is consumed.

The present invention has been made in view of the above situation, and provides an inspection apparatus and an inspection method for an active matrix display device which can continuously perform an inspection of an electrical characteristic and an inspection of a display state. It is an object of the present invention to do so.

[0007]

According to the present invention, there is provided an inspection apparatus for an active matrix display device, wherein a plurality of conductive contact members capable of contacting respective input terminals of the active matrix display device are connected to the plurality of conductive contact members. By doing
A driving unit that outputs a drive signal for driving the active matrix display device to each of the plurality of conductive contact members, and an electrical connection between the plurality of conductive contact members by being connected to the plurality of conductive contact members. a resistance test means for measuring the resistance, by switching between said drive means and said resistor inspection means, one of said drive means and said resistor inspection means
And a connection switching means for connecting the plurality of conductive contact members to the plurality of conductive contact members, and measuring the luminance of the active matrix display device.
And a control means for controlling the luminance measuring means.
And a step, whereby the above object is achieved.

[0008] The connection switching means may select two or more measurement conductive contact members from the plurality of conductive contact members, and connect the selected measurement conductive contact members to the resistance inspection means.

[0009]

According to the method for testing an active matrix display device of the present invention , each input terminal of the active matrix display device is provided.
A plurality of conductive contact members each capable of contacting the
The plurality of conductive contacts by being connected to the electrical contact member.
Driving the active matrix display device on each of the members
Driving means for outputting a driving signal to be driven, and the plurality of conductive contacts
By being connected to the touch member, the plurality of connected conductors are connected.
Resistance inspection means for measuring the electrical resistance between the electrical contact members,
By switching between the driving means and the resistance inspection means,
One of the driving means and the resistance testing means
A connection switching means for connecting to a number of conductive contact members, comprising: an active matrix display device, wherein each input terminal of the active matrix display device has a plurality of conductive contacts. Contacting each of the members; selecting one of a first test for driving the active matrix display device and a second test for measuring an electrical resistance between the plurality of conductive contact members; And a step of performing an inspection, whereby the object is achieved.

[0011] In the second step, at the time of performing the second inspection, two or more measurement conductive contact members are selected from the plurality of conductive contact members, and the selected two or more measurement conductive contact members are selected. It may be a step of measuring the electric resistance between them.

[0012]

When the active matrix display device is set once in the inspection device of the active matrix display device of the present invention, a drive signal for display inspection is sent from the drive unit to the set active matrix display device by switching the connection switching unit. Alternatively, the electric resistance between the input terminals of the active matrix display device can be measured by the resistance inspection means. When measuring the electric resistance, an input terminal measured by the connection switching means can be selected. When a drive signal for display inspection is sent to the active matrix display device, the display state can be inspected by visual observation or image processing of a captured image.
In addition, when the electric resistance between the input terminals of the active matrix display device is measured, the characteristics of the switching element and the short-circuit and disconnection of the wiring such as the gate bus line, the source bus line and the counter electrode are inspected, or the connection between these is inspected. It can be checked whether the resistance value is proper.

As a result, with the inspection apparatus of the present invention, if the active matrix display device is set once, the inspection of the display state and the inspection of the electrical characteristics can be performed continuously.

[0014]

The present invention will be described below with reference to examples.

As shown in FIG. 1, the inspection apparatus of the present embodiment has a moving stage 11. The moving stage 11
This is for setting the active matrix display device, and can be moved in the vertical and horizontal XY directions under the control of the control computer 12. Above the moving stage 11, a connection switching device 13 to which a probe card is attached is arranged. The probe card is an electrode provided with a large number of needle-shaped conductive contact members, and a drive circuit 14 and a resistance measuring device 15 are connected to the respective conductive contact members via a connection switching device 13. The drive circuit 14 is a circuit that sends a drive signal for inspection to each conductive contact member of the probe card. The resistance measuring device 15 is connected to a conductive contact member to be measured with a relay or the like,
A voltage is applied between the connected conductive contact members and the electrical resistance between these conductive contact members is measured. The connection switching device 13 switches between the drive circuit 14 and the resistance measurement device 15 to connect to each conductive contact member of the probe card. The connection switching device 13 can switch a combination of connections when the resistance measuring device 15 is connected to each conductive contact member of the probe card. The connection switching device 13 switches this connection using a relay.

Above the connection switching device 13, a luminance measuring device 16 is disposed. The luminance measurement device 16 is controlled by the luminance measurement control device 17 and measures the luminance of the active matrix display device set on the moving stage 11. Further, on both sides of the moving stage 11, transporting devices 18 for carrying the active matrix display device into and out of the moving stage 11 are arranged.

When the inspection of the active matrix display device is performed by the inspection device having the configuration shown in FIG. 1, first, the setting of the active matrix display device is performed. The active matrix display device is carried into the moving stage 11 by the transfer device 18. The moving stage 11 is provided with a backlight cold cathode tube and a polarizing plate,
The loaded active matrix display device is placed on the cold cathode tube and the polarizing plate. When the active matrix display device is placed, a polarizing plate is also placed thereon, and the setting is completed.

When the setting of the active matrix display device is completed, the moving stage 11 is raised, and each input terminal of the active matrix display device is connected to the probe card attached to the connection switching device 13.
That is, the active matrix display device 1 shown in FIG.
The respective gate bus line terminals 1a, the respective source bus line terminals 1b, and the respective counter electrode terminals 1c are brought into contact with the respective conductive contact members 2a of the probe card 2. At this time, by moving the moving stage 11 in the horizontal direction, positioning is performed so that each of the input terminals 1a to 1c and each of the conductive contact members 2a are correctly contacted.

As shown in FIG. 3, a plurality of gate bus lines 1d and a plurality of source bus lines 1e are provided on the active matrix substrate of the active matrix display device 1.
Are arranged to be orthogonal. Gate bus line 1
At each intersection of d and the source bus line 1e, a thin film transistor 1f, which is a switching element, is arranged, and its gate electrode is connected to the gate bus line 1d and its source electrode is connected to the source bus line 1e. The picture element capacity 1g and the additional capacity 1h of each picture element are connected to the drain electrode of the thin film transistor 1f. One end of each gate bus line 1d has a gate bus line terminal 1a.
Are connected, and a source bus line terminal 1b is connected to one end of each source bus line 1e. The counter electrode terminal 1c is arranged at an appropriate position alongside the multiple source bus line terminals 1b.

First, the inspection of the display state will be described.

The inspection of the display state is performed by connecting the drive circuit 14 to the active matrix display device by the connection switching device 13 and sending a drive signal for the display state inspection from the drive circuit 14. At this time, the cold cathode tube of the connection switching device 13 is turned on. The light from the cold cathode tube passes through the lower polarizer of the active matrix display device, the active matrix display device, and the upper polarizer. Therefore, the orientation state of the liquid crystal of each picture element of the set active matrix display device, that is, the display state can be observed. In this display state inspection, a drive signal to be sent to the active matrix display device is controlled for each input terminal so as to be as close to an actual display as possible.

In such a display state inspection, if the active matrix substrate has a defect, it appears as a bright spot or a bright line during display. Defective characteristics of the counter electrode and defective orientation of the liquid crystal can also be detected as display defects.

When performing a contrast test, a signal of a black level and a signal of a white level are sent from the drive circuit 14 to each source bus line terminal 1b. When the luminance of the black level and the luminance of the white level are measured and calculated by the luminance measurement device 16 controlled by the luminance measurement control device 17, the contrast can be measured.

Next, inspection of electrical characteristics will be described.

When the electrical characteristics are to be inspected, the resistance measuring device 15 is connected to the active matrix display device by the connection switching device 13. In this inspection of electrical characteristics,
In order to reduce the inspection time, each input terminal of the active matrix display device is divided into groups, and measurement is performed among these groups. In this case, the resistance measurement between the gate bus line terminal 1a and the counter electrode terminal 1c and the resistance measurement between the source bus line terminal 1b and the counter electrode terminal 1c are different from the inspection using the active matrix substrate alone. The electric resistance of the circuit via the counter electrode substrate and the liquid crystal layer sealed between them is measured.

(1) Inspection of short circuit between source bus lines As a method of inputting a signal to the source bus line, a method shown in FIG.
A method of alternately inputting data from both ends every other source bus line as shown in FIG.
Various methods such as a method of alternately inputting from both ends for each book are used. Therefore, source bus line terminal 1
b is also arranged according to the signal input method to the source bus line.

Regardless of which input method is used, the method of checking for a short circuit between source bus lines is the same. In the short circuit inspection between the source bus lines, the wiring of the relay is performed so that the resistance between the adjacent source bus lines can be measured.
That is, each source bus line is divided into two groups so that adjacent source bus lines are different groups, and the resistance between these groups is collectively determined.
Measure via relay.

When signals are alternately input from both ends of every other source bus line, the source bus line terminals 1b are arranged at every other end of the source bus line as shown in FIG. In this case, first, the conductive contact members 2a that are in contact with the source bus line terminals 1b arranged at one end of the source bus line are short-circuited and arranged at the other end of the source bus line. A short circuit occurs between the conductive contact members 2a that are in contact with the source bus line terminals 1b. The connection switching device 13 is switched so that the resistance measuring device 15 is connected between the groups of the short-circuited conductive contact members 2a, and the resistance between the groups is measured.

When signals are alternately input from both ends every three source bus lines, the source bus line terminals 1b are arranged as shown in FIG. In this case, the conductive contact member 2a at one end and the conductive contact member 2a at the other end of the source bus line are short-circuited every other conductive contact member on each side. Further, the remaining conductive contact members 2a are short-circuited. The connection switching device 13 is switched so that the resistance measuring device 15 is connected between the two groups of the short-circuited conductive contact members 2a, and the resistance between the two groups is measured.

(2) Inspection of short-circuit between source bus line and gate bus line In short-circuit inspection between source bus line and gate bus line, all source bus line terminals 1b and all gate bus line terminals 1a are collected. And measure the resistance.

FIG. 6 shows each bus line terminal 1 when signals are alternately input from both ends every other source bus line.
2 shows a connection diagram between a and 1b and a resistance inspection device 15. FIG. Also,
FIG. 7 shows a connection diagram between the bus line terminals 1a and 1b and the resistance tester 15 when signals are alternately input from both ends for every three source bus lines. In any case, the conductive contact members 2a in contact with the source bus line terminal 1b and the conductive contact members 2a in contact with the gate bus line terminal 1a are short-circuited. The resistance measuring device 15 is connected between the groups of the short-circuited conductive members 2a via the relay, and the resistance between the groups is measured.

(3) Short circuit inspection between source bus line and counter electrode terminal In short circuit inspection between source bus line and counter electrode terminal 1c, all source bus line terminals 1b and all counter electrode terminals 1c are collected. And measure the resistance.

FIGS. 8 and 9 show each terminal 1b when signals are alternately input from both ends every other source bus line and when signals are alternately input from both ends every three lines.
1c and a connection diagram of the resistance tester 15 are shown. In any case, the conductive contact members 2a in contact with the source bus line terminals 1b and the counter electrode terminals 1a
The conductive contact members 2a in contact with c are short-circuited. A resistance measuring device 15 is connected via a relay between the groups of the short-circuited conductive members 2a to measure the resistance between the groups.

(4) Inspection of short-circuit between gate bus lines In short-circuit inspection between gate bus lines, each gate bus line is divided into two groups so that adjacent gate bus lines are respectively different groups. And collectively measure the resistance. That is, FIG.
0 and as shown in FIG. 11, the gate bus line terminal 1a
Each of the conductive contact members 2a of the probe card 2 to be connected to each other is short-circuited every other gate bus line, and the resistance measuring device 15 is connected between the two groups of the short-circuited conductive contact members 2a. The switching of the switching device 13 is performed. FIG. 10 shows the connection of the resistance measuring device 15 when every other source bus line terminal 1b is arranged, and FIG. 11 shows the resistance when every three source bus line terminals 1b are arranged. 3 shows the connection of the measuring device 15.

(5) Short circuit inspection between gate bus line and counter electrode terminal In short circuit inspection between gate bus line and counter electrode terminal 1c, all gate bus line terminals 1a and all counter electrode terminals 1c are collected. And measure the resistance.

FIG. 12 shows the connection of the resistance measuring device 15 when every other source bus line terminal 1b is arranged, and FIG. 13 shows the case where every third source bus line terminal 1b is arranged. 4 shows the connection of the resistance measuring device 15.

As described above, according to the inspection apparatus of the present invention, the inspection of the display state of the active matrix display device and the inspection of the electrical characteristics are continuously performed only by setting the active matrix display device once. Will be able to do it.

[0038]

As is apparent from the above description, according to the inspection apparatus of the present invention, the inspection of the display state of the active matrix display device and the inspection of the electrical characteristics can be continuously performed by one setting. Therefore, as compared with the case where these inspections are performed by separate devices, the labor for setting and the consumption of the probe card or the like serving as the conductive contact member can be reduced.

[Brief description of the drawings]

FIG. 1, showing an embodiment of the present invention, is a configuration diagram of an inspection apparatus.

FIG. 2, showing an embodiment of the present invention, is a plan view illustrating a connection between an active matrix display device and a probe card.

FIG. 3, showing an embodiment of the present invention, is a partially enlarged plan view of an active matrix substrate.

FIG. 4 is a plan view showing one embodiment of the present invention and showing connections of source bus lines of a first active matrix display device at the time of a short circuit test.

FIG. 5, showing an embodiment of the present invention, is a plan view illustrating connection of a source bus line of a second active matrix display device during a short circuit test.

FIG. 6, showing an embodiment of the present invention, is a plan view illustrating a connection at the time of a short circuit inspection between a source bus line and a gate bus line of the first active matrix display device.

FIG. 7, showing an embodiment of the present invention, is a plan view showing a connection at the time of a short circuit inspection between a source bus line and a gate bus line of a second active matrix display device.

FIG. 8 is a plan view showing one embodiment of the present invention and showing a connection at the time of a short circuit inspection between a source bus line and a counter electrode terminal of the first active matrix display device.

FIG. 9 illustrates one embodiment of the present invention, and is a plan view illustrating a connection at the time of a short circuit inspection between a source bus line and a counter electrode terminal of a second active matrix display device.

FIG. 10 shows an embodiment of the present invention,
FIG. 5 is a plan view showing a connection at the time of a short circuit test between gate bus lines of the active matrix display device of FIG.

FIG. 11 shows an embodiment of the present invention,
FIG. 5 is a plan view showing a connection at the time of a short circuit test between gate bus lines of the active matrix display device of FIG.

FIG. 12 shows an embodiment of the present invention,
FIG. 7 is a plan view showing a connection at the time of a short circuit inspection between a gate bus line and a counter electrode terminal of the active matrix display device of FIG.

FIG. 13 shows an embodiment of the present invention,
FIG. 7 is a plan view showing a connection at the time of a short circuit inspection between a gate bus line and a counter electrode terminal of the active matrix display device of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Active matrix display device 1a Gate bus line terminal 1b Source bus line terminal 1c Counter electrode terminal 2 Probe card 2a Conductive contact member 13 Connection switching device 14 Drive circuit 15 Resistance measuring device

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Motoki Iguro 22-22, Nagaikecho, Abeno-ku, Osaka-shi, Osaka Inside Sharp Corporation (72) Inventor Tatsuya Sasaki 22-22, Nagaikecho, Abeno-ku, Osaka-shi, Osaka Co., Ltd. (72) Inventor Nobuyuki Kawase 22-22 Nagaikecho, Abeno-ku, Osaka-shi, Osaka Sharp Co., Ltd. (56) References JP-A-4-50660 (JP, A) JP-A-63-289590 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) G01R 31/00-31/06

Claims (3)

(57) [Claims] A plurality of conductive contact members capable of contacting respective input terminals of the active matrix display device; and being connected to the plurality of conductive contact members, each of the plurality of conductive contact members is provided with the active contact member. A driving unit that outputs a driving signal for driving the matrix display device; a resistance inspection unit that is connected to the plurality of conductive contact members to measure an electrical resistance between the plurality of connected conductive contact members; A connection switching unit for connecting one of the driving unit and the resistance inspection unit to the plurality of conductive contact members by switching between the driving unit and the resistance inspection unit; An inspection device for an active matrix display device, further comprising: a luminance measuring means for measuring luminance; and a control means for controlling the luminance measuring means. 2. A plurality of conductive contact members, each of which is capable of contacting each input terminal of an active matrix display device, and being connected to the plurality of conductive contact members, each of the plurality of conductive contact members is provided with the active contact member. A driving unit that outputs a driving signal for driving the matrix display device; a resistance inspection unit that is connected to the plurality of conductive contact members to measure an electrical resistance between the plurality of connected conductive contact members; An active matrix display device, comprising: a connection switching unit that connects one of the driving unit and the resistance inspection unit to the plurality of conductive contact members by switching between the driving unit and the resistance inspection unit. An inspection method of an active matrix display device using the device, wherein each input terminal of the active matrix display device includes a plurality of conductive contact members. And selecting one of a first test for driving the active matrix display device and a second test for measuring electrical resistance between the plurality of conductive contact members, and selecting A method for inspecting an active matrix display device, the method comprising: 3. The second step includes, when performing the second inspection, selecting two or more measurement conductive members from the plurality of conductive contact members, and selecting the selected two or more measurement conductive members. The method for testing an active matrix display device according to claim 2 , wherein the method is a step of measuring an electric resistance during the period.