JPH0345953Y2 - - Google Patents

Info

Publication number
JPH0345953Y2
JPH0345953Y2 JP1987037808U JP3780887U JPH0345953Y2 JP H0345953 Y2 JPH0345953 Y2 JP H0345953Y2 JP 1987037808 U JP1987037808 U JP 1987037808U JP 3780887 U JP3780887 U JP 3780887U JP H0345953 Y2 JPH0345953 Y2 JP H0345953Y2
Authority
JP
Japan
Prior art keywords
molecular beam
crucible
beam source
opening
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987037808U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63145866U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987037808U priority Critical patent/JPH0345953Y2/ja
Publication of JPS63145866U publication Critical patent/JPS63145866U/ja
Application granted granted Critical
Publication of JPH0345953Y2 publication Critical patent/JPH0345953Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1987037808U 1987-03-13 1987-03-13 Expired JPH0345953Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987037808U JPH0345953Y2 (enExample) 1987-03-13 1987-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987037808U JPH0345953Y2 (enExample) 1987-03-13 1987-03-13

Publications (2)

Publication Number Publication Date
JPS63145866U JPS63145866U (enExample) 1988-09-27
JPH0345953Y2 true JPH0345953Y2 (enExample) 1991-09-27

Family

ID=30849467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987037808U Expired JPH0345953Y2 (enExample) 1987-03-13 1987-03-13

Country Status (1)

Country Link
JP (1) JPH0345953Y2 (enExample)

Also Published As

Publication number Publication date
JPS63145866U (enExample) 1988-09-27

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