JPS63145866U - - Google Patents
Info
- Publication number
- JPS63145866U JPS63145866U JP3780887U JP3780887U JPS63145866U JP S63145866 U JPS63145866 U JP S63145866U JP 3780887 U JP3780887 U JP 3780887U JP 3780887 U JP3780887 U JP 3780887U JP S63145866 U JPS63145866 U JP S63145866U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- crucible
- beam source
- evaporated material
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000001451 molecular beam epitaxy Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3780887U JPH0345953Y2 (enExample) | 1987-03-13 | 1987-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3780887U JPH0345953Y2 (enExample) | 1987-03-13 | 1987-03-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63145866U true JPS63145866U (enExample) | 1988-09-27 |
| JPH0345953Y2 JPH0345953Y2 (enExample) | 1991-09-27 |
Family
ID=30849467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3780887U Expired JPH0345953Y2 (enExample) | 1987-03-13 | 1987-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345953Y2 (enExample) |
-
1987
- 1987-03-13 JP JP3780887U patent/JPH0345953Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0345953Y2 (enExample) | 1991-09-27 |
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