JPH0343229Y2 - - Google Patents

Info

Publication number
JPH0343229Y2
JPH0343229Y2 JP3189787U JP3189787U JPH0343229Y2 JP H0343229 Y2 JPH0343229 Y2 JP H0343229Y2 JP 3189787 U JP3189787 U JP 3189787U JP 3189787 U JP3189787 U JP 3189787U JP H0343229 Y2 JPH0343229 Y2 JP H0343229Y2
Authority
JP
Japan
Prior art keywords
crucible
lid
graphite
outer crucible
inner crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3189787U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63139497U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3189787U priority Critical patent/JPH0343229Y2/ja
Publication of JPS63139497U publication Critical patent/JPS63139497U/ja
Application granted granted Critical
Publication of JPH0343229Y2 publication Critical patent/JPH0343229Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3189787U 1987-03-06 1987-03-06 Expired JPH0343229Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3189787U JPH0343229Y2 (enrdf_load_stackoverflow) 1987-03-06 1987-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3189787U JPH0343229Y2 (enrdf_load_stackoverflow) 1987-03-06 1987-03-06

Publications (2)

Publication Number Publication Date
JPS63139497U JPS63139497U (enrdf_load_stackoverflow) 1988-09-13
JPH0343229Y2 true JPH0343229Y2 (enrdf_load_stackoverflow) 1991-09-10

Family

ID=30838055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3189787U Expired JPH0343229Y2 (enrdf_load_stackoverflow) 1987-03-06 1987-03-06

Country Status (1)

Country Link
JP (1) JPH0343229Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100375341B1 (ko) * 2000-08-18 2003-03-10 대백신소재주식회사 흑연화 처리용 도가니
JP7291197B2 (ja) * 2021-07-15 2023-06-14 キヤノントッキ株式会社 成膜装置、成膜方法及び蒸発源ユニット

Also Published As

Publication number Publication date
JPS63139497U (enrdf_load_stackoverflow) 1988-09-13

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