JPH0343214B2 - - Google Patents

Info

Publication number
JPH0343214B2
JPH0343214B2 JP57055323A JP5532382A JPH0343214B2 JP H0343214 B2 JPH0343214 B2 JP H0343214B2 JP 57055323 A JP57055323 A JP 57055323A JP 5532382 A JP5532382 A JP 5532382A JP H0343214 B2 JPH0343214 B2 JP H0343214B2
Authority
JP
Japan
Prior art keywords
composition
thin film
lithium
sputtering
amorphous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57055323A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58172234A (ja
Inventor
Katsumi Myauchi
Keiichi Kanebori
Tetsuichi Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5532382A priority Critical patent/JPS58172234A/ja
Publication of JPS58172234A publication Critical patent/JPS58172234A/ja
Publication of JPH0343214B2 publication Critical patent/JPH0343214B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y02E60/12—

Landscapes

  • Optical Integrated Circuits (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Primary Cells (AREA)
JP5532382A 1982-04-05 1982-04-05 非晶質リチウムタンタレ−ト・リチウムニオベイト薄膜およびその製造方法 Granted JPS58172234A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5532382A JPS58172234A (ja) 1982-04-05 1982-04-05 非晶質リチウムタンタレ−ト・リチウムニオベイト薄膜およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5532382A JPS58172234A (ja) 1982-04-05 1982-04-05 非晶質リチウムタンタレ−ト・リチウムニオベイト薄膜およびその製造方法

Publications (2)

Publication Number Publication Date
JPS58172234A JPS58172234A (ja) 1983-10-11
JPH0343214B2 true JPH0343214B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-07-01

Family

ID=12995331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5532382A Granted JPS58172234A (ja) 1982-04-05 1982-04-05 非晶質リチウムタンタレ−ト・リチウムニオベイト薄膜およびその製造方法

Country Status (1)

Country Link
JP (1) JPS58172234A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5971264A (ja) * 1982-10-15 1984-04-21 Sanyo Electric Co Ltd 固体電解質電池
GB2422563A (en) * 2003-03-13 2006-08-02 Acoustical Tech Sg Pte Ltd Preparing a lithium, niobium tantalum oxide film
US9379415B2 (en) * 2014-02-21 2016-06-28 Panasonic Intellectual Property Management Co., Ltd. Entire solid lithium secondary battery

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS595560B2 (ja) * 1976-04-20 1984-02-06 日本電気株式会社 ＬｉＮｂ↓１−ｘＴａｘｏ↓３単結晶膜の製造方法

Also Published As

Publication number Publication date
JPS58172234A (ja) 1983-10-11

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