JPH0343175B2 - - Google Patents

Info

Publication number
JPH0343175B2
JPH0343175B2 JP61146448A JP14644886A JPH0343175B2 JP H0343175 B2 JPH0343175 B2 JP H0343175B2 JP 61146448 A JP61146448 A JP 61146448A JP 14644886 A JP14644886 A JP 14644886A JP H0343175 B2 JPH0343175 B2 JP H0343175B2
Authority
JP
Japan
Prior art keywords
main body
shaft portion
circumferential surface
inner circumferential
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61146448A
Other languages
English (en)
Japanese (ja)
Other versions
JPS631647A (ja
Inventor
Akira Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Steel Co Ltd
Original Assignee
Taiyo Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Steel Co Ltd filed Critical Taiyo Steel Co Ltd
Priority to JP61146448A priority Critical patent/JPS631647A/ja
Publication of JPS631647A publication Critical patent/JPS631647A/ja
Publication of JPH0343175B2 publication Critical patent/JPH0343175B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP61146448A 1986-06-23 1986-06-23 無接触吸着装置 Granted JPS631647A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61146448A JPS631647A (ja) 1986-06-23 1986-06-23 無接触吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61146448A JPS631647A (ja) 1986-06-23 1986-06-23 無接触吸着装置

Publications (2)

Publication Number Publication Date
JPS631647A JPS631647A (ja) 1988-01-06
JPH0343175B2 true JPH0343175B2 (enrdf_load_stackoverflow) 1991-07-01

Family

ID=15407867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61146448A Granted JPS631647A (ja) 1986-06-23 1986-06-23 無接触吸着装置

Country Status (1)

Country Link
JP (1) JPS631647A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2575580Y2 (ja) * 1993-03-27 1998-07-02 太陽誘電株式会社 回路基板支持装置
WO2000009975A1 (de) * 1998-08-11 2000-02-24 Siemens Aktiengesellschaft Messeinrichtung zum berührungslosen messen von eigenschaften eines bewegten metallbandes
JP2006160434A (ja) * 2004-12-06 2006-06-22 Nippon Dempa Kogyo Co Ltd 非接触搬送装置
KR100928674B1 (ko) * 2009-04-07 2009-11-27 삼성코닝정밀유리 주식회사 비접촉 석션 그립핑 장치 및 이를 갖는 비접촉 석션 그립핑 프레임
KR101293288B1 (ko) * 2010-04-19 2013-08-09 주식회사 에이엠에이치시스템즈 예각 비접촉 진공패드
JP5995198B2 (ja) * 2010-10-29 2016-09-21 国立研究開発法人産業技術総合研究所 非接触吸着装置
KR101600382B1 (ko) * 2014-05-12 2016-03-08 제트에스-핸들링 게엠베하 비접촉식 기판 그립핑 장치
CN106737803B (zh) * 2017-02-15 2018-12-25 泉州市墨语贸易有限公司 一种机器人吸持夹具上结构改良的吸盘
CN110182427B (zh) * 2019-05-15 2021-05-25 安徽盛烨电子有限公司 一种自动垫纸设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5191459A (enrdf_load_stackoverflow) * 1975-02-07 1976-08-11
JPS5628140A (en) * 1979-08-10 1981-03-19 Gunze Ltd Method of taking out pasteboard one by one
JPS61111251A (ja) * 1984-11-01 1986-05-29 Kuresen Sangyo Kk 平板状部材の保持装置
US4654356A (en) * 1985-08-01 1987-03-31 E. R. Squibb & Sons, Inc. 7-oxabicycloheptane substituted diacid diamide prostaglandin analogs
JPS6292337A (ja) * 1985-10-17 1987-04-27 Canon Inc ウエハ保持装置

Also Published As

Publication number Publication date
JPS631647A (ja) 1988-01-06

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