JPH0342505A - 接触式光センサを備えたスキャンニングピン - Google Patents

接触式光センサを備えたスキャンニングピン

Info

Publication number
JPH0342505A
JPH0342505A JP2165487A JP16548790A JPH0342505A JP H0342505 A JPH0342505 A JP H0342505A JP 2165487 A JP2165487 A JP 2165487A JP 16548790 A JP16548790 A JP 16548790A JP H0342505 A JPH0342505 A JP H0342505A
Authority
JP
Japan
Prior art keywords
laser
scanning
scanning pin
mirror
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2165487A
Other languages
English (en)
Japanese (ja)
Inventor
Ubbo Ricklefs
ウッボ　リックレフス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems Holdings GmbH
Original Assignee
Wild Leitz GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wild Leitz GmbH filed Critical Wild Leitz GmbH
Publication of JPH0342505A publication Critical patent/JPH0342505A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/04—Interferometer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/21—Geometrical instruments with laser

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2165487A 1989-06-24 1990-06-22 接触式光センサを備えたスキャンニングピン Pending JPH0342505A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3920716.1 1989-06-24
DE3920716A DE3920716C1 (enExample) 1989-06-24 1989-06-24

Publications (1)

Publication Number Publication Date
JPH0342505A true JPH0342505A (ja) 1991-02-22

Family

ID=6383480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2165487A Pending JPH0342505A (ja) 1989-06-24 1990-06-22 接触式光センサを備えたスキャンニングピン

Country Status (4)

Country Link
US (1) US5103572A (enExample)
EP (1) EP0405176B1 (enExample)
JP (1) JPH0342505A (enExample)
DE (2) DE3920716C1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002541445A (ja) * 1999-04-06 2002-12-03 レニショウ パブリック リミテッド カンパニー 光センサ付き表面検査装置

Families Citing this family (28)

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DE4204632A1 (de) * 1990-08-28 1993-08-19 Leitz Messtechnik Zentriereinrichtung fuer einen mechanischen tastkopf
GB9116044D0 (en) * 1991-07-24 1991-09-11 Nat Res Dev Probes
US5394757A (en) * 1992-06-25 1995-03-07 Thiokol Corporation Multiple stylus probe attachment and methods
DE4238724C1 (de) * 1992-11-17 1993-12-23 Leitz Mestechnik Gmbh Zentriereinrichtung für einen mechanischen Taster
DE4244240B4 (de) * 1992-12-24 2005-07-07 Carl Zeiss Industrielle Messtechnik Gmbh Taststift
DE4325744C1 (de) * 1993-07-31 1994-12-15 Heidenhain Gmbh Dr Johannes Mehrkoordinaten-Tastkopf
US5619318A (en) * 1993-08-10 1997-04-08 Olympus Optical Co., Ltd. Optical displacement sensor
JP4122069B2 (ja) * 1997-06-12 2008-07-23 ベルス・メステヒニーク・ゲーエムベーハー フィーラ部材を備えた座標測定装置及びフィーラ部材の位置測定のための光学センサ
US5883875A (en) * 1997-09-02 1999-03-16 International Business Machines Corporation Short coherent-length optical tomograph for high density volume optical data storage devices
US5948960A (en) * 1998-02-09 1999-09-07 Intel Corporation HTMU test handler throw measuring unit
EP1320720A2 (de) * 2000-09-20 2003-06-25 Werth Messtechnik GmbH Anordnung und verfahren zum opto-taktilen messen von strukturen
US6978551B2 (en) 2000-12-22 2005-12-27 Krake Kelly R Picture hanging device
DE10108774A1 (de) * 2001-02-23 2002-09-05 Zeiss Carl Koordinatenmessgerät zum Antasten eines Werkstücks, Tastkopf für ein Koordinatenmessgerät und Verfahren zum Betrieb eines Koordinatenmessgerätes
GB0114360D0 (en) * 2001-06-13 2001-08-08 Renishaw Plc Stylus orientation
DE10153606A1 (de) * 2001-11-02 2003-05-15 Univ Hannover Vorrichtung zur Bestimmung einer Bauteilauslenkung
US20040068881A1 (en) * 2002-10-15 2004-04-15 Optical Gaging Products, Inc. Viscous coupled micro interposer
KR20050063790A (ko) * 2002-10-29 2005-06-28 코닌클리케 필립스 일렉트로닉스 엔.브이. 좌표 측정 디바이스와 물체의 위치 측정 방법
JP4783575B2 (ja) * 2005-03-24 2011-09-28 シチズンホールディングス株式会社 接触式変位測長器
GB0506158D0 (en) * 2005-03-24 2005-05-04 Renishaw Plc Measurement probe
GB0508388D0 (en) 2005-04-26 2005-06-01 Renishaw Plc Surface sensing device with optical sensor
DE102005037160B4 (de) * 2005-08-06 2007-09-06 SIOS Meßtechnik GmbH Verfahren und Vorrichtung zur taktilen Erfassung
JP4933775B2 (ja) * 2005-12-02 2012-05-16 独立行政法人理化学研究所 微小表面形状測定プローブ
US20070204473A1 (en) * 2006-03-03 2007-09-06 Honda Motor Co., Ltd. Spindle locating laser for nut runner
EP2385339A1 (en) * 2010-05-05 2011-11-09 Leica Geosystems AG Surface sensing device with optical monitoring system
DE102012003223A1 (de) * 2012-02-20 2013-08-22 Carl Zeiss 3D Automation Gmbh Kugel-Schaft-Verbindung
EP2657642A1 (de) * 2012-04-24 2013-10-30 Hexagon Technology Center GmbH Sensorelement für eine Messmaschine, insbesondere eine Koordinatenmessmaschine
DE102015119274B4 (de) * 2015-11-09 2018-07-12 Björn Habrich Verfahren und Vorrichtung zur Bestimmung der räumlichen Position eines Gegenstandes mittels interferometrischer Längenmessung
US9835433B1 (en) 2017-05-09 2017-12-05 Tesa Sa Touch trigger probe

Family Cites Families (20)

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Publication number Priority date Publication date Assignee Title
US2846919A (en) * 1954-04-27 1958-08-12 Penn Optical And Instr Co Interferometer
US4153370A (en) * 1977-12-05 1979-05-08 The United States Of America As Represented By The United States Department Of Energy Microinterferometer transducer
DE2937431C2 (de) * 1979-09-15 1987-02-05 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Einrichtung zur Meßwerterfassung an Prüflingen
US4475812A (en) * 1980-04-08 1984-10-09 The United States Of America As Represented By The Secretary Of The Navy Cavity coupled optical condition sensor
NL8005259A (nl) * 1980-09-22 1982-04-16 Philips Nv Inrichting voor het meten aan het oppervlak van een voorwerp.
US4694184A (en) * 1980-11-14 1987-09-15 Diffracto Ltd. Coordinate measuring method and device using a contact member
US4453082A (en) * 1980-11-14 1984-06-05 Diffracto Ltd. Coordinate measuring method and device
SU993011A1 (ru) * 1981-06-24 1983-01-30 Московский Ордена Ленина Институт Инженеров Геодезии, Аэрофотосъемки И Картографии Интерферометр дл измерени больших перемещений
US4574199A (en) * 1983-01-27 1986-03-04 Diffracto Ltd. Sensing location of an object
US4643577A (en) * 1983-07-15 1987-02-17 Wero Ohg Roth & Co. Length measuring apparatus based on the dual laser beam interferometer principle
US4513507A (en) * 1983-09-02 1985-04-30 Bendix Automation Company Contact sensing probe for a measuring apparatus
JPH0697261B2 (ja) * 1984-06-01 1994-11-30 シャープ株式会社 半導体レ−ザを用いた微小変位測定装置
JPS617402A (ja) * 1984-06-21 1986-01-14 Sotsukishiya:Kk 位置検出装置
JPH0690009B2 (ja) * 1985-02-28 1994-11-14 シャープ株式会社 半導体レーザを用いた微小変位測定方法
SU1413421A1 (ru) * 1985-10-14 1988-07-30 Предприятие П/Я А-1758 Измерительна головка
SU1394034A1 (ru) * 1985-10-14 1988-05-07 Предприятие П/Я А-1758 Измерительна головка
US4824240A (en) * 1986-04-15 1989-04-25 Hughes Aircraft Company Internal laser interferometer
DD252233A1 (de) * 1986-09-01 1987-12-09 Zeiss Jena Veb Carl Tasteranordnung mit fotoelektrischer signalgewinnung
US4714346A (en) * 1986-09-22 1987-12-22 Gte Laboratories Incorporated Frequency chirped interferometric displacement sensors and mechanical translation tips therefor
DE3824549A1 (de) * 1988-07-20 1990-01-25 Zeiss Carl Fa Lagerung fuer tastkoepfe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002541445A (ja) * 1999-04-06 2002-12-03 レニショウ パブリック リミテッド カンパニー 光センサ付き表面検査装置

Also Published As

Publication number Publication date
US5103572A (en) 1992-04-14
DE59000402D1 (de) 1992-12-03
EP0405176A1 (de) 1991-01-02
DE3920716C1 (enExample) 1990-11-29
EP0405176B1 (de) 1992-10-28

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