JPH0342036Y2 - - Google Patents

Info

Publication number
JPH0342036Y2
JPH0342036Y2 JP1984130052U JP13005284U JPH0342036Y2 JP H0342036 Y2 JPH0342036 Y2 JP H0342036Y2 JP 1984130052 U JP1984130052 U JP 1984130052U JP 13005284 U JP13005284 U JP 13005284U JP H0342036 Y2 JPH0342036 Y2 JP H0342036Y2
Authority
JP
Japan
Prior art keywords
crystal
particles
amount
monitoring
crystal resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984130052U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6144926U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13005284U priority Critical patent/JPS6144926U/ja
Publication of JPS6144926U publication Critical patent/JPS6144926U/ja
Application granted granted Critical
Publication of JPH0342036Y2 publication Critical patent/JPH0342036Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP13005284U 1984-08-28 1984-08-28 モニタ用水晶振動子 Granted JPS6144926U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13005284U JPS6144926U (ja) 1984-08-28 1984-08-28 モニタ用水晶振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13005284U JPS6144926U (ja) 1984-08-28 1984-08-28 モニタ用水晶振動子

Publications (2)

Publication Number Publication Date
JPS6144926U JPS6144926U (ja) 1986-03-25
JPH0342036Y2 true JPH0342036Y2 (cs) 1991-09-03

Family

ID=30688661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13005284U Granted JPS6144926U (ja) 1984-08-28 1984-08-28 モニタ用水晶振動子

Country Status (1)

Country Link
JP (1) JPS6144926U (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5621590B2 (ja) * 2010-12-28 2014-11-12 日本電波工業株式会社 エッチング量センサ及びエッチング量測定方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5488790A (en) * 1977-12-26 1979-07-14 Seiko Instr & Electronics Ltd Resonant frequency adjusting method for crystal oscillator
JPS58117714A (ja) * 1982-01-06 1983-07-13 Hitachi Ltd 水晶板ヘツドの構造

Also Published As

Publication number Publication date
JPS6144926U (ja) 1986-03-25

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