JPH0339341B2 - - Google Patents
Info
- Publication number
- JPH0339341B2 JPH0339341B2 JP20786585A JP20786585A JPH0339341B2 JP H0339341 B2 JPH0339341 B2 JP H0339341B2 JP 20786585 A JP20786585 A JP 20786585A JP 20786585 A JP20786585 A JP 20786585A JP H0339341 B2 JPH0339341 B2 JP H0339341B2
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- optical memory
- substrate
- resist
- guide track
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 8
- 239000011521 glass Substances 0.000 description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20786585A JPS6266443A (ja) | 1985-09-19 | 1985-09-19 | 光メモリ素子用フオトマスク |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20786585A JPS6266443A (ja) | 1985-09-19 | 1985-09-19 | 光メモリ素子用フオトマスク |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6266443A JPS6266443A (ja) | 1987-03-25 |
JPH0339341B2 true JPH0339341B2 (enrdf_load_stackoverflow) | 1991-06-13 |
Family
ID=16546825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20786585A Granted JPS6266443A (ja) | 1985-09-19 | 1985-09-19 | 光メモリ素子用フオトマスク |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6266443A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2562703B2 (ja) * | 1989-12-27 | 1996-12-11 | 株式会社小松製作所 | 直列制御装置のデータ入力制御装置 |
-
1985
- 1985-09-19 JP JP20786585A patent/JPS6266443A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6266443A (ja) | 1987-03-25 |
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