JPH0339006B2 - - Google Patents

Info

Publication number
JPH0339006B2
JPH0339006B2 JP16659783A JP16659783A JPH0339006B2 JP H0339006 B2 JPH0339006 B2 JP H0339006B2 JP 16659783 A JP16659783 A JP 16659783A JP 16659783 A JP16659783 A JP 16659783A JP H0339006 B2 JPH0339006 B2 JP H0339006B2
Authority
JP
Japan
Prior art keywords
monosilane
phosphine
mole
silane
containing compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16659783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6060915A (ja
Inventor
Yasutaka Ozaki
Takeyuki Hirashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuyama Corp
Original Assignee
Tokuyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuyama Corp filed Critical Tokuyama Corp
Priority to JP16659783A priority Critical patent/JPS6060915A/ja
Publication of JPS6060915A publication Critical patent/JPS6060915A/ja
Publication of JPH0339006B2 publication Critical patent/JPH0339006B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Catalysts (AREA)
  • Silicon Compounds (AREA)
JP16659783A 1983-09-12 1983-09-12 低ハロゲン化シランまたはモノシランの製造方法 Granted JPS6060915A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16659783A JPS6060915A (ja) 1983-09-12 1983-09-12 低ハロゲン化シランまたはモノシランの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16659783A JPS6060915A (ja) 1983-09-12 1983-09-12 低ハロゲン化シランまたはモノシランの製造方法

Publications (2)

Publication Number Publication Date
JPS6060915A JPS6060915A (ja) 1985-04-08
JPH0339006B2 true JPH0339006B2 (enExample) 1991-06-12

Family

ID=15834234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16659783A Granted JPS6060915A (ja) 1983-09-12 1983-09-12 低ハロゲン化シランまたはモノシランの製造方法

Country Status (1)

Country Link
JP (1) JPS6060915A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011132621A1 (ja) * 2010-04-22 2011-10-27 電気化学工業株式会社 水素化ハロゲン化シランの不均化反応用の触媒及びそれを用いたモノシランの製造方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61183111A (ja) * 1985-02-07 1986-08-15 Toa Nenryo Kogyo Kk シランの製造方法
JPS61201615A (ja) * 1985-03-04 1986-09-06 Toa Nenryo Kogyo Kk シランの製造法
WO2009148878A2 (en) * 2008-05-29 2009-12-10 Ndsu Research Foundation Method of forming functionalized silanes
US8206676B2 (en) 2009-04-15 2012-06-26 Air Products And Chemicals, Inc. Method for making a chlorosilane
DE102010062984A1 (de) * 2010-12-14 2012-06-14 Evonik Degussa Gmbh Verfahren zur Herstellung höherer Halogen- und Hydridosilane

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011132621A1 (ja) * 2010-04-22 2011-10-27 電気化学工業株式会社 水素化ハロゲン化シランの不均化反応用の触媒及びそれを用いたモノシランの製造方法
JPWO2011132621A1 (ja) * 2010-04-22 2013-07-18 電気化学工業株式会社 水素化ハロゲン化シランの不均化反応用の触媒及びそれを用いたモノシランの製造方法

Also Published As

Publication number Publication date
JPS6060915A (ja) 1985-04-08

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