JPH0336795B2 - - Google Patents

Info

Publication number
JPH0336795B2
JPH0336795B2 JP60154503A JP15450385A JPH0336795B2 JP H0336795 B2 JPH0336795 B2 JP H0336795B2 JP 60154503 A JP60154503 A JP 60154503A JP 15450385 A JP15450385 A JP 15450385A JP H0336795 B2 JPH0336795 B2 JP H0336795B2
Authority
JP
Japan
Prior art keywords
substrate
growth
crystal
vibration
annealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60154503A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6217093A (ja
Inventor
Suminori Sakamoto
Kimihiro Oota
Naoyuki Kawai
Itaru Nakagawa
Takeshi Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP15450385A priority Critical patent/JPS6217093A/ja
Publication of JPS6217093A publication Critical patent/JPS6217093A/ja
Publication of JPH0336795B2 publication Critical patent/JPH0336795B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP15450385A 1985-07-13 1985-07-13 薄膜結晶成長法 Granted JPS6217093A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15450385A JPS6217093A (ja) 1985-07-13 1985-07-13 薄膜結晶成長法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15450385A JPS6217093A (ja) 1985-07-13 1985-07-13 薄膜結晶成長法

Publications (2)

Publication Number Publication Date
JPS6217093A JPS6217093A (ja) 1987-01-26
JPH0336795B2 true JPH0336795B2 (enExample) 1991-06-03

Family

ID=15585664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15450385A Granted JPS6217093A (ja) 1985-07-13 1985-07-13 薄膜結晶成長法

Country Status (1)

Country Link
JP (1) JPS6217093A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002095485A2 (en) 2001-05-23 2002-11-28 E-Vision, L.L.C. Focusing mirrors having variable reflective properties

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51146177A (en) * 1975-06-11 1976-12-15 Fujitsu Ltd Fabrication method of basic plate for diode device
JPS6027689A (ja) * 1983-07-26 1985-02-12 Agency Of Ind Science & Technol ＡｌＧａＡｓ結晶の分子線結晶成長法

Also Published As

Publication number Publication date
JPS6217093A (ja) 1987-01-26

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Legal Events

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EXPY Cancellation because of completion of term