JPH0446363B2 - - Google Patents

Info

Publication number
JPH0446363B2
JPH0446363B2 JP15450485A JP15450485A JPH0446363B2 JP H0446363 B2 JPH0446363 B2 JP H0446363B2 JP 15450485 A JP15450485 A JP 15450485A JP 15450485 A JP15450485 A JP 15450485A JP H0446363 B2 JPH0446363 B2 JP H0446363B2
Authority
JP
Japan
Prior art keywords
growth
crystal
electron beam
intensity
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15450485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6215407A (ja
Inventor
Suminori Sakamoto
Kimihiro Oota
Naoyuki Kawai
Itaru Nakagawa
Takeshi Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP15450485A priority Critical patent/JPS6215407A/ja
Publication of JPS6215407A publication Critical patent/JPS6215407A/ja
Publication of JPH0446363B2 publication Critical patent/JPH0446363B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP15450485A 1985-07-13 1985-07-13 結晶膜厚測定法 Granted JPS6215407A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15450485A JPS6215407A (ja) 1985-07-13 1985-07-13 結晶膜厚測定法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15450485A JPS6215407A (ja) 1985-07-13 1985-07-13 結晶膜厚測定法

Publications (2)

Publication Number Publication Date
JPS6215407A JPS6215407A (ja) 1987-01-23
JPH0446363B2 true JPH0446363B2 (enExample) 1992-07-29

Family

ID=15585686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15450485A Granted JPS6215407A (ja) 1985-07-13 1985-07-13 結晶膜厚測定法

Country Status (1)

Country Link
JP (1) JPS6215407A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9022268D0 (en) * 1990-10-13 1990-11-28 Cmb Foodcan Plc Sterilising apparatus

Also Published As

Publication number Publication date
JPS6215407A (ja) 1987-01-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term