JPH0336289B2 - - Google Patents

Info

Publication number

JPH0336289B2

JPH0336289B2 JP20297482A JP20297482A JPH0336289B2 JP H0336289 B2 JPH0336289 B2 JP H0336289B2 JP 20297482 A JP20297482 A JP 20297482A JP 20297482 A JP20297482 A JP 20297482A JP H0336289 B2 JPH0336289 B2 JP H0336289B2

Authority

JP

Japan

Prior art keywords

etching

aluminum

foil

surface area

aluminum foil

Prior art date

1982-11-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 229910052782 aluminium Inorganic materials 0.000 claims description 41
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 41
• 239000011888 foil Substances 0.000 claims description 40
• 238000005530 etching Methods 0.000 claims description 27
• 239000003990 capacitor Substances 0.000 claims description 20
• -1 Oxygen ions Chemical class 0.000 claims description 14
• 239000007864 aqueous solution Substances 0.000 claims description 10
• 239000000460 chlorine Substances 0.000 claims description 8
• 229910052801 chlorine Inorganic materials 0.000 claims description 8
• 238000005468 ion implantation Methods 0.000 claims description 8
• 238000004519 manufacturing process Methods 0.000 claims description 7
• 238000000034 method Methods 0.000 claims description 6
• 239000001301 oxygen Substances 0.000 claims description 6
• 229910052760 oxygen Inorganic materials 0.000 claims description 6
• 230000000694 effects Effects 0.000 description 7
• 239000000126 substance Substances 0.000 description 6
• VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
• FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
• 238000006243 chemical reaction Methods 0.000 description 4
• 230000007423 decrease Effects 0.000 description 4
• 239000012535 impurity Substances 0.000 description 4
• 238000005096 rolling process Methods 0.000 description 4
• 230000015572 biosynthetic process Effects 0.000 description 3
• 238000000137 annealing Methods 0.000 description 2
• 238000007796 conventional method Methods 0.000 description 2
• 238000005260 corrosion Methods 0.000 description 2
• 230000007797 corrosion Effects 0.000 description 2
• 150000002500 ions Chemical class 0.000 description 2
• 235000002639 sodium chloride Nutrition 0.000 description 2
• 239000011780 sodium chloride Substances 0.000 description 2
• VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
• 230000002411 adverse Effects 0.000 description 1
• KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
• 239000004327 boric acid Substances 0.000 description 1
• 238000005266 casting Methods 0.000 description 1
• 239000013078 crystal Substances 0.000 description 1
• 239000006185 dispersion Substances 0.000 description 1
• 238000005259 measurement Methods 0.000 description 1
• 238000002844 melting Methods 0.000 description 1
• 230000008018 melting Effects 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 238000002156 mixing Methods 0.000 description 1
• 239000000203 mixture Substances 0.000 description 1
• TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
• 239000002244 precipitate Substances 0.000 description 1
• 238000012545 processing Methods 0.000 description 1
• 238000011160 research Methods 0.000 description 1
• 238000005204 segregation Methods 0.000 description 1
• 239000000243 solution Substances 0.000 description 1
• WYXIGTJNYDDFFH-UHFFFAOYSA-Q triazanium;borate Chemical compound [NH4+].[NH4+].[NH4+].[O-]B([O-])[O-] WYXIGTJNYDDFFH-UHFFFAOYSA-Q 0.000 description 1