JPH032334B2 - - Google Patents

Info

Publication number

JPH032334B2

JPH032334B2 JP20278382A JP20278382A JPH032334B2 JP H032334 B2 JPH032334 B2 JP H032334B2 JP 20278382 A JP20278382 A JP 20278382A JP 20278382 A JP20278382 A JP 20278382A JP H032334 B2 JPH032334 B2 JP H032334B2

Authority

JP

Japan

Prior art keywords

etching

aluminum

aluminum foil

surface area

ions

Prior art date

1982-11-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 40
• 229910052782 aluminium Inorganic materials 0.000 claims description 40
• 239000011888 foil Substances 0.000 claims description 38
• 239000003990 capacitor Substances 0.000 claims description 21
• -1 Oxygen ions Chemical class 0.000 claims description 11
• 239000007864 aqueous solution Substances 0.000 claims description 9
• 150000002500 ions Chemical class 0.000 claims description 7
• 238000004519 manufacturing process Methods 0.000 claims description 7
• 239000001301 oxygen Substances 0.000 claims description 6
• 229910052760 oxygen Inorganic materials 0.000 claims description 6
• VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 2
• 238000005530 etching Methods 0.000 description 28
• 239000000460 chlorine Substances 0.000 description 6
• 229910052801 chlorine Inorganic materials 0.000 description 6
• 230000000694 effects Effects 0.000 description 6
• 238000005468 ion implantation Methods 0.000 description 6
• 238000000034 method Methods 0.000 description 5
• 239000000126 substance Substances 0.000 description 5
• VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
• 238000006243 chemical reaction Methods 0.000 description 4
• 238000010438 heat treatment Methods 0.000 description 4
• 239000012535 impurity Substances 0.000 description 4
• 238000005096 rolling process Methods 0.000 description 4
• 230000007423 decrease Effects 0.000 description 3
• 238000000137 annealing Methods 0.000 description 2
• 230000015572 biosynthetic process Effects 0.000 description 2
• 238000007796 conventional method Methods 0.000 description 2
• 238000005260 corrosion Methods 0.000 description 2
• 230000007797 corrosion Effects 0.000 description 2
• FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
• 230000002411 adverse Effects 0.000 description 1
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
• 239000004327 boric acid Substances 0.000 description 1
• 238000005266 casting Methods 0.000 description 1
• 239000013078 crystal Substances 0.000 description 1
• 239000006185 dispersion Substances 0.000 description 1
• 238000002844 melting Methods 0.000 description 1
• 230000008018 melting Effects 0.000 description 1
• 238000002156 mixing Methods 0.000 description 1
• 239000000203 mixture Substances 0.000 description 1
• TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
• 125000004430 oxygen atom Chemical group O* 0.000 description 1
• 239000002244 precipitate Substances 0.000 description 1
• 238000001953 recrystallisation Methods 0.000 description 1
• 238000005204 segregation Methods 0.000 description 1
• 235000002639 sodium chloride Nutrition 0.000 description 1
• 239000011780 sodium chloride Substances 0.000 description 1
• 239000000243 solution Substances 0.000 description 1